Planar Waveguide and Integrated Optical Sensors

Glass or fused quartz Various glasses Ta Oj, Nb Oj polymers 

There are several ways by which planar waveguides and sensors in 10 form can be realized (Selvarajan and Asoundi 1995 Buck 1995). The type of material chosen more or less determines the process technology to be employed. In the case of glass, wet and dry ion-exchange techniques are commonly used 

14 Materials for Optical, Fiber Optic, and Integrated Optical Sensors 

---