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Mixed-frequency deposition

Mixed-frequency deposition of the nitride is one possibility to adjust the stress in the deposited layer [122]. The ratio of the deposition times in the high-frequency (375 kHz) and low-frequency (187.5 kHz) plasma can be varied during the process. For the layer used here 95% high-frequency deposition time was chosen (Fig. 4.14e).The stress was measured on wafer-level with a thin-film stress analyzer. The stress value was determined by recording the curvature of the wafer after thin-film deposition. A tensile stress of 75 5 MPa was measured for the layer. [Pg.48]

The mass spectrometry analysis was performed by the matrix assisted laser desorption/ionisation time-of-flight (S8-MALDI) technique using a Voyager-DE PRO Biospectrometry Workstation (Applied Biosystems, USA). Radiation pulses of 0.5 ns and 3 Hz frequency from N2 laser operating at 337 nm were used to desorb the species and negative/positive ions formed were detected in reflectron mode. Sulfur used as a matrix material was also dissolved in toluene and mixed with the samples solution prior to deposition onto a target. [Pg.244]

PVA, 88 mg) was mixed with 0.2 ml of HEPES buffer solution (1 x 10-2 mol dm 3 HEPES, 10 ml total) at pH 7.0 containing BCECF (5 mg) and stirred for several minutes at room temperature. The mixture was then cast on an ITO-coated quartz substrate by a spin-coating method, and water was removed by evaporation. A semitransparent aluminum (Al) film was deposited on the dried polymer film by a vacuum vapor deposition method. The ITO and Al films were used as electrodes. A sinusoidal ac voltage with a modulation frequency of 40 H z was applied to a sample polymer, and the field-induced change in fluorescence intensity was detected with a lock-in amplifier at the second harmonic of the modulation frequency. A dc component of the fluorescence intensity was simultaneously observed. [Pg.329]

The types of nerve fibers that are blocked when a local anesthetic is injected about a mixed peripheral nerve depend on the concentration of drug used, nerve-fiber size, intemodal distance, and frequency and pattern of nerve-impulse transmission ("see above). Anatomical factors are similarly important. Nerves in the outer mantle of the mixed nerve are blocked first. These fibers usually are distributed to more proximal anatomical structures than are those situated near the core of the mixed nerve and often are motor. If the volume and concentration of local anesthetic solution deposited about the nerve are adequate, the local anesthetic eventually will diffuse inward in amounts adequate to block even the most centrally located fibers. Since removal of local anesthetics occurs primarily in the core of a mixed nerve or nerve trunk, where the vascular supply is located, the duration of blockade of centrally located nerves is shorter than that of more peripherally situated fibers. [Pg.250]

Fig. 10 Mixed potential diagram for an electroless Cu deposition bath, / net is the measured (total) current, / red is the determined from the rate of Cu deposition (rate of QCM frequency change) using Faraday s law, and / ox was then determined by the difference. Working electrode Cu (area 0.34 cm ) on 5-MHz quartz crystal. Solution contained 5 mmol dm CUSO4, 10 mmol dm Na2EDTA, 50 mmol dm Na2S04, and 50 mmol dm HCHO at pH 10.8. Temperature 70 C. (Reproduced from Ref [67] with permission from The Electrochemical Society.)... Fig. 10 Mixed potential diagram for an electroless Cu deposition bath, / net is the measured (total) current, / red is the determined from the rate of Cu deposition (rate of QCM frequency change) using Faraday s law, and / ox was then determined by the difference. Working electrode Cu (area 0.34 cm ) on 5-MHz quartz crystal. Solution contained 5 mmol dm CUSO4, 10 mmol dm Na2EDTA, 50 mmol dm Na2S04, and 50 mmol dm HCHO at pH 10.8. Temperature 70 C. (Reproduced from Ref [67] with permission from The Electrochemical Society.)...

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