SEARCH Articles Figures Tables Electrochemical Methods for 3D Microstructure Fabrication Additive Plating and Wet Subtractive Etching Fabrication free-standing microstructures Fabrication metal microstructures, assembling Fabrication, microstructure bonding LIGA process microstructure fabrication Microfabrication/microstructure fabrication Microstructured fabrication techniques Phase Masks for the Fabrication of Microstructures