LIGA process microstructure fabrication

The plastic molding process may be combined with deep etch X-ray lithography to fabricate microstructures with different shapes in the third dimension" In the first step, only the upper part of a very thick resist layer is patterned with the embossing technique using a mold insert fabricated by the standard LIGA process. The relief structure obtained by this first patterning process is subsequently exposed to synchrotron radiation through a precisely... 

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