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Fabrication free-standing microstructures

Garel O et al (2007) Fabrication of free-standing porous silicon microstructures. J Micromech Microeng 17 S164-S167... [Pg.709]

See other pages where Fabrication free-standing microstructures is mentioned: [Pg.11]    [Pg.164]    [Pg.293]    [Pg.22]    [Pg.239]    [Pg.373]    [Pg.131]    [Pg.717]    [Pg.789]    [Pg.123]    [Pg.392]    [Pg.227]   
See also in sourсe #XX -- [ Pg.112 , Pg.120 , Pg.123 , Pg.160 ]



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Free-standing

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