Phase Masks for the Fabrication of Microstructures

An example of Fresnel lenses etched into the triazene polymer is shown in Fig. 95. The ablation structures are well defined (shown in Fig. 95, left), 

The combination of gray-tone phase masks with the highly sensitive photopolymers is suitable for the fast fabrication of three-dimensional topographies. Single laser pulses can create complex structures, such as Fresnel lenses. A pattern transfer into glass or quartz, e.g., by proportional etching techniques, would open an even larger spectrum of applications. 

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