Micromechanical sensor

D. Cho, R. Warrington Jr., A. Pisano, H. Bau, C. Friedrich,. ara-Almonte, and. Liburdy, eds.. Micromechanical Sensors, Mctuators and Systems, American Society of Mechanical Engineers, New York, 1991. 

More details on appliance markets are given in Chapter 2, together with some data on the sensors in question. There has been some recent research into the markets of modern micromechanical sensors in household appliances, documenting the market potential for various types of sensors in this area, including those for pressure, acceleration and tilt, thermopiles, flow and gas sensors [3]. Examples of future developments will also be given. 

The latest development are micromechanical sensors. Their development began with the large-scale introduction of silicon micromachined pressure sensors to the automotive industry in the nineties, which entailed a massive price reduction. Then acceleration sensors for airbag firing, yaw rate sensors and more were introduced. Many devices are still being discovered. The next step is product evolution, with introduction times between a few years and over a decade, as shown in Tab. 2.2. Once customers in the industry have accepted a product, investment in large-scale production can go ahead. It helps to find more applications for the product The time scale for the product evolution process varies from about five... 

Moroney, R. M. White, R. M. Howe, R. T. DSC-32, Symposium on Micromechanical Sensors, Actuators and Systems, ASME Winter Annual Meeting, 181-90 (1991). 

In order to be protected against environmental interference, microelectronic or microfabricated chips must be enclosed into specific packages. For some micromechanical sensors, cap wafers with etched cavities are attached hermetically onto the device wafers using anodic, eutectic, or glass frit bonding. 

B. Frazier, J. W. Babb, M. G. Allen, and D. G. Taylor, Design and Fabrication of Electroplated MMicromotor Structures, Micromechanical Sensors, Actuators, and Systems, DSC 32, 135-146, Dynamic Systems and Control Division, New York (1991). 

Choi, S.B., Barron R.F. and Warrington R.O., Fluid Flow and Heat Transfer in Microtubes, Micromechanical Sensors, Actuators, and Systems, ASME DSC-32, 1991, 123-134. 

Choi S. B., R. F. Barron, and R. O. Warrington, 1991, Fluid Flow And Heat Transfer In Microtubes, Micromechanical Sensors, Actuators, And Systems ASME DSC 32, 123-134. 

J. K. Gimzewski, Ch. Gerber, E. Meyer and R. R. Schlittler, Observation of a Chemical Reaction using a Micromechanical Sensor, Chem. Phys. Lett.,... 

EXPLOSIVE VAPOUR DETECTION USING MICROMECHANICAL SENSORS... 

E.A. Wachter and T. Thundat, Micromechanical sensors for chemical and physical measurements, Review of Scientific Instruments, 66 (1995) 3662-3667. 

Explosive vapour detection using micromechanical sensors 249... 

Chapters 15 and 16 continue with a discussion of some of the new types of electronic noses namely a fast GC column with a SAW detector and secondly the use of micromechanical sensors. 

In-situ Stress Measurements at the Solid/Liquid Interface Using a Micromechanical Sensor... 

De Rossi, D., Veltink, H., 2010. Wearable technology for biomechanics e-textile or micromechanical sensors IEEE Engineering in Medicine and Biology Magazine 37—43. May/June. 

Pellejero I, Agustt J, Urbiztondo MA, Ses J, Pina MP, Santamarta J, Abadal G. Nanoporous silicalite-only cantilevers as micromechanical sensors Fabrication, resonance response and VOCs sensing performance. Sens Actuators B 2012 171-712 822-831. 

J.N. (1991) Gas and liquid flow in small channels. Symposium on Micromechanical Sensors, Actuators, and Systems, 1991, ASME DSC-Vol. 32, pp. 49 -60. 

Surface stress can be measured by a number of experiments, including piezoelectric elements [145], ribbon electrodes [146], and more recently developed micromechanical sensors [147-149]. It can be also measured with AFM and STM, as demonstrated by several groups [150,151]. The AFM and STM-based surface stress measurements usually detect the bending of a thin plate (cantilever) as a result of a surface stress change at one of the two surfaces. If the plate is isotropic and freely standing, the change in the surface stress can be calculated from the amount of bending by [152]... 

These materials are being investigated as micromagnetic actuators and micromechanical sensors. 

Choi, S.B. et al. (1991). Liquid flow and heat transfer in microtubes. In Micromechanical Sensors, Actuators and Systems. Eds Choi et al. ASME DSC 32, pp. 123-134. 

Berger et al. [34] measured the surface stress changes and kinetics by micromechanical sensors during the self-assembly process of HS-(CH2) i-CH3 for n = 4, 6, 8,12, and 14 on gold, where n is the number of carbon atoms in the alkyl chain. The sensor deflection was shown to be a function of time for experiments with alkanethi-ols of various chain lengths (fig. 7.4a) and has been fitted to a Langmuir adsorption isotherm model as... 

A. Boisen, S. Dohn, S.S. Keller, S. Schmid, M. Tenje, Cantilever-Eke micromechanical sensors. Reports on Progress in Physics 74 (2011) 036101. 

GIM Gimzewski, J. K., Gerber, C., Meyer, E., Schlittler, R. R. Observation of a chemical reaction using a micromechanical sensor Chem. Phys. Lett. 217 (1994) 589. 

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