Microfluidic system microelectromechanical

Recent developments in microelectromechanical systems (MEMS) have enabled the integration and fabrication of numerous micro components such as pumps, valves and nozzles into complex high-speed microfluidic machines. These systems posses geometrical dimensions in the range 1 -1000 p,m, which are 10 -10" times less than conventional machines, and operate at liquid flow speeds up to 300 m/s. It has been confirmed that microfluidic systems, like their large-scale counterparts, are susceptible to the deleterious effects of cavitation when appropriate hydro-... 

Professor Clifford L Henderson is a member of the American Institute of Chemical Engineers the American Chemical Society, the International Society for Optical Engineering, the Materials Research Society, and the Electrochemical Society. He has authored more than 125 papers and holds 9 patents in areas related to his research. Dr. Henderson s research interests are in the areas of polymer science, thin films, nanotechnology, organic electronic materials, and miaosystem processing (i.e., the fabrication of microelectronic, optoelectronic, microfluidic, and microelectromechanical systems). 

Microelectromechanical systems (MEMS) combine the electronics of microchips with micromechanical features and microfluidics to create unique devices. The multitude of MEMS applications continues to grow including many types of accelerometers, radio frequency (RF) devices, variable capacitors, strain and pressure sensors, deformable micromirrors for image projection systems, vibrating micro-membranes for acoustic devices, ultrasound probes, micro-optical electromechanical systems (MOEMS) and MEMS gyroscopes, to name a few. 

Logic gates on microelectromechanical systems (MEMS) Logic gates on microfluidic biochip Logic gates on microfluidic lab-on-chip... 

Microelectromechanical systems (MEMSs) are integrated micromechanical and electronic parts on silicon or glass plates. They are produced by lithography technology. Various sensors, micromotors, biochips, chemical reactors, biomolecular devices, microfluid lanes, and so on, are produced by MEMSs. 

S.K. Cho, H.J. Moon, C.J. Kim, Creating, transporting, cutting and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits. Journal of Microelectromechanical Systems, 2003, 12, 70-80. 

This chapter presents a literature survey of the applications of porous silicon in BioMEMS (biological/biomedical microelectromechanical systems). This material possesses properties particularly suitable for biomedical purposes biocompatibility, biodegradability, photoluminescence, ability to precisely control the pore size and shape, and possibility to easily modify the surface chemistry. Many applications can, for instance, be found in the fields of sensing and delivery of therapeutics. It is expected that the number of BioMEMS using porous silicon will continue to increase in the future with the development of lab-on-a-chip/microfluidic devices. 

Bassetti, M., Chatteijee, A., Alum, N. and Beebe, D. (2005) Development and modeling of electrically triggered hydrogels for microfluidic applications, J. Microelectromechanical Systems, 14, 1198-207. 

J. C. Roulet, R. Volkel, H. P. Herzig, E. Verpoorte, N. F. de Rooij, and R. Dandliker, "Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection," Journal of Microelectromechanical Systems, vol. 10, pp. 482-491, Dec 2001. 

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