Microelectromechanical system technology

Aircraft Testing. Water and mercury manometers were used extensively in aerospace test facilities such as wind tunnels, where banks of manometers indicated the distribution of pressure around the surfaces of models from pressure-sensing holes in the models. Pressure switches connecting numerous pressuresensing ports to a single sensor became common in the 1970 s. In the 1990 s, inexpensive sensors based on microelectromechanical systems technology enabled numerous independent sensing channels to be monitored simultaneously. 

Cao L, Mantell S, Polla D (2001) Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology. Sens Actuators a-Phys 94 117-125... 

Microturbines are miniature rotating machines that convert fluid energy into mechanical energy, implemented using microelectromechanical systems technologies or other... 

As physical structures used in technological applications have been reduced in size, there has been an increasing need to understand the limiting processes of adhesion and to try to minimize them. For example, adhesion due to humidity is known to have a major effect on the durabihty and friction forces experienced at the recording head/disk interface. Microelectromechanical systems (MEMS) are also detrimentally affected by nanoscale adhesion, with their motion being perturbed or prevented. 

A wide variety of solid-state sensors based on hydrogen-specific palladium, metal oxide semiconductor (MOS), CB, electrochemical, and surface acoustic wave (SAW) technology are used in the industry for several years. Microelectromechanical systems (MEMS), and nanotechnology-based devices for the measurement of hydrogen are the recent developments. These developments are mainly driven by the demands of the fuel cell industry. Solid-state approaches are gaining rapid popularity within the industry due to their low cost, low maintenance, replacements, and flexibility of multiple installations with minimal labor. 

Our communications infrastructure relies heavily on advanced materials chemistries. From the manufacturing processes used to fabricate optical fiber cables to molecular beam epitaxy techniques for the creation of nanoscale heterostructures that enable many optical devices, innovations in materials chemistry have played a role. An example of a recent technological achievement that relates to optical communications systems is the MEMS-based (microelectromechanical system) Lambda Router. The Lambda Router is an optical system developed at Lucent Technologies for switching narrowly focused... 

MEMS (microelectromechanical systems) are systems with small device sizes of 1-100 pm. They are typically driven by electrical signals. To fabricate such systems materials like semiconductors, metals, and polymers are commonly used. MEMS technology fabrication is very cost-efficient. The structures are transferred by processes, which are applied to many systems on one substrate or even many of them simultaneously. The most important fabrication processes are physical vapor deposition (PVD), chemical vapor deposition (CVD), lithography, wet chemical etching, and dry etching. Typical examples for MEMS are pressure, acceleration, and gyro sensors [28,29], DLPs [30], ink jets [31], compasses [32], and also (bio)medical devices. 

Niklaus F. Adhesive wafer bonding for microelectronic and microelectromechanical systems. Ph.D. Thesis, Royal Institute of Technology (KTH), Stockholm, Sweden. 

Yuzhakov et al. [93] describe the production of an intracutaneous microneedle array and provide an account of its use (microfabrication technology). Various embodiments of this invention can include a microneedle array as part of a closed loop system smart patch to control drug delivery based on feedback information from analysis of body fluids. Dual purpose hollow microneedle systems for transdermal delivery and extraction which can be coupled with electrotransport methods are also described by Trautman et al. [91] and Allen et al. [100]. These mechanical microdevices which interface with electronics in order to achieve a programmed or controlled drug release are referred to as microelectromechanical systems (MEMS) devices. 

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