Liquid-phase atomic layer epitaxy,

Lindroos S, Kanniainen T, Leskela M (1994) Growth of ZnS thin films by liquid-phase atomic layer epitaxy (LPALE). Appl Surf Sci 75 70-74... 

One way to prepare precise surface structures on catalyst supports is to utilize adsorption controlled methods. Adsorption covers a variety of interactions from physisorption (weak interaction) to chemisorption (strong interaction). The term control, however, restricts the adsorption to strong interactions. The requirements for adsorption controlled catalyst processing have been shown to be met in both liquid and gas phase. In this paper we focus on the use of a gas phase method, called Atomic Layer Epitaxy (ALE), in the preparation of heterogeneous... 

Adsorption control in catalyst preparation can be achieved from both liquid and gas phase once the necessary conditions for the strong interaction between precursor and support have been created. This review has focused on the atomic layer epitaxy (ALE) method where the gas-solid reactions of precursors are directed to the strong interaction of covalent bond formation. In ALE, surface saturation is systematically utilized, providing the means for precise control of metal density and rendering the method truly adsorption controlled. 

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