Line width roughness

Figure 14.24 Resolution capability of XP6627 EUV resist from Rohm and Haas, showing 25-nm and 30-nm dense (1 1) line/space features, with less than 2.5-nm line edge roughness and 3.5-nm line width roughness. Imaging was done on an EUV interferometric tool at Paul Scherrer Institute in Switzerland. (Courtesy of J. Thackeray.)...

The RELACS technique offers many advantages over a thermal shrink approach. For example, it reduces iso-dense bias when compared to thermal shrink techniques, has very low pitch dependence, reduces LER and line width roughness (LWR), and improves etch resistance. 

PAG-bound copolymer o jg copoly(2MAdMA-THFMA-NMA-TPSTFBSMA). TPSTFBSMA is triphenylsulfonium tetrafluorobenzene sulfonium methacrylate. PAG triphenylsulfonium is directly bound with a copolymer chain. The acid diffusion length of the copolymer is reported to be 8.5 nm. The line width roughness (LWR) remains very low over a wide focal range. 

Under ideal conditions, a commercial X-band spectrometer can detect about 1012 spins (ca. 10-12 moles) at room temperature. This number of spins in a 1 cm3 sample corresponds to a concentration of about 1(U9 m. By ideal conditions, we mean a single line, on the order of 0.1 G wide, with sensitivity going down roughly as the reciprocal square of the line width. When the resonance is split into two or more hyperfine lines, sensitivity decreases still further. Nonetheless, ESR is a remarkably sensitive technique, especially compared with NMR. 

As the behavior of the spectral line width, 7710(1/77), can roughly be regarded as linear in 77 and the coefficient value 21n2 1.386 is close to 1.2, the approximation (4.3.38) holds workable for normal orientations even at AQ>>t]. 

He found a rough correlation of line width with decay times, namely, as the decay time decreased, the line widths increased. He points out, however, that these changes were only a maximum of 30 cm-1 for 2 per cent glasses. 

The rate at which s approaches d can be found from (7.9) to be roughly t 1 2(a — c). The time needed for to spread out over the full circle is n2(2d/r). For small r this is much longer than rs, so that the field E first attains its stationary amplitude and subsequently the phase spreads out along the ridge. In the emitted radiation this uncertainty of the phase creates a line width [compare (VIII.3.12)]... 

Using the temperature dependence of NMR spectra, thermodynamic data of interconversions due to intramolecular mobility can be determined. If the coalescence temperature is known, the rate constant at Tc is calculated according to eq. (3.10). Often, Tc and (vA — vB) are not known exactly. In this case, a rough value for kr can be calculated by measuring the half maximum intensity line widths dv1/2(T, at temperatures near Tc and using eq. (3.11) [107, 108],... 

IET line widths are determined by thermal and instrumental broadening, the latter being primarily due to the applied modulation voltage. With a superconducting Pb counter-electrode, the full-width-at-half-maximum (FWHM) of an IETS peak is given roughly by [ 15 ]... 

If excess material were added to the bank without lateral transport the bank would grow in size but in fact material is transported towards the edges of a film, beyond the edges of the feed and so increasing the width of the product. Usually, after the ultimate nip, an excess width of film is trimmed away as waste if this is not done care must be taken to make sure there is no variation in the surface finish in the areas of extended width. Occasionally a thin line of roughness will indicate the end of the width of material on Roll 3, and in the extended area flow marks are more likely to be found. 

In general. Tie > T2e and the line width depends mainly on spin-spin interactions. T2e increases on decreasing the spin concentration, that is, the spin-spin distance in the system. On the other hand when Tie becomes very short, below roughly 10 sec, its effect on the lifetime of a species in a given energy level makes an important contribution to the linewidth. In some cases the EPR lines are broadened beyond detection. 

This energy difference is not, however, the rotational energy barrier between the rotational isomers. The latter can be estimated from the rate of interconversion between the isomers as a function of temperature. That rate of interconversion is roughly 4 x I02 s l at —30°C. At —60°C, as estimated from the line width at that temperature [13.19], it is roughly 1/3 of that value, or 1.3 x 102s-1, Assuming that the rate of interconversion satisfies an Arrhenius type of behavior, lc oc e F-3 RT, where E is the rotational energy barrier,... 

Finally, there is an interesting correlation between the values of 72(8/2) and molecular structure. For DC12AO the values of 72(8/2) are much greater than the Lorentzian value At 100° they are 5.5 for the neat phase and 4.5 for the middle phase. Sodium oleate (NaOl), which has a cis double bond in the middle of the chain, has considerably lower values of 72(8/2) for both middle (3.9) and neat (4.3) phases. The differences between the NaOl values and values found for saturated soaps are even greater. The lower values of 72(8/2) for NaOl indicate that the distribution of motions along the NaOl chain is more uniform. The double bond appears to act as another end, in effect making the chains much shorter. This is supported by the line width of NaOl (Table IV) which in the neat phase is roughly what one finds in a C12 — Cu chain. The double bond in the chain should have little effect in the middle phase. This appears to be borne out by both the 72(8/2) and line width data. The 72(8/2) for sodium elaidate... 

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