Monolithic Integrated Circuits

Many of these steps include CVD, and CVD is now a major process in the fabrication of monolithic integrated circuits (IC), custom and semi-custom ASIC s, active discrete devices, transistors, diodes, passive devices and networks, hybrid IC s, opto-elec-tronic devices, energy-conversion devices, and microwave devices. 

A rapid evolution occurred in the electronics industiy after the invention of the transistor and the monolithic integrated circuit ... 

An integrated circuit (IC) is a monolithic assembly of electrically isolated circuit elements. What this means is that each circuit element is formed on top of, or beneath, other circuit elements to form a compact assembly. Each conductive layer is separated by a non-conducting layer, usually composed of an oxide such as silicon dioxide, Si02- The assembly includes... 

S.A. Bota, A. Dieguez, J.L. Merino, R. Casanova, J. Samitier, and C. Cane. A Monolithic Interface Circuit for Gas Sensor Arrays Control and Measurement , Analog Integrated Circuits and Signal Processing 40 (2004), 175-184. 

Planar resonators and microstrip and coplanar transmission lines represent the passive elements in almost any integrated circuit technology at first, on chip integration in socalled mmics (monolithic microwave integrated circuits) with SiGe or m/v semiconducting active... 

Prior to 1950, these industries were based on vacuum tube technology, and most electronic gear was assembled on metal chassis with mechanical attachment, soldering, and hand wiring. All the components of pretransistor electronic products—vacuum tubes, capacitors, inductors, and resistors— were manufactured by mechanical processes. A rapid evolution occurred after the invention of the transistor and the monolithic integrated circuit. Today s electronic equipment is filled with integrated circuits, interconnection boards, and other devices that are all manufactured by chemical processes. The medium used for the transmission of information and data over dis-... 

Epitaxy—The growth of crystalline layers of semiconducting materials in a layered structure. Integrated circuits—Complex electronic circuits fabricated using multiple growth and lithography/ pattern transfer stages to produce many miniature electronic elements on a monolithic device. 

In monolithic Integrated circuit technology, all circuit elements are fabricated on, or within, a single crystal piece of semiconductor material by means of a sequential series of diffusion, photolithography and thin film processes. As a production method, generally where thin film resistors are required, the following process sequence Is defined ... 

The developed methods of metallization of different materials are widely used in the enterprises of the Commonwealth of Independent States (CIS) for production of quartz resonators and filters (several tens of min. were produced), monolithic piezoquartz filters, photomasks, piezoceramic devices for hydroacoustics and delay lines of colour TV sets (several hundreds of min. were produced), casings of integrated circuits and semiconducting apparatus, ceramic microplates, precise microwire resistors and other devices. 

The varied devices previously discussed may be combined with other active or passive circuit elements to make integrated circuits. The major of ICs using III-V materials are Digital ICs, monolithic microwave integrated circuits (MMICs) and opto-electronic integrated circuits (OEICs). 

MMICS were developed for DoD applications such as radar and weapons systems, but have found commercial inroads with cellular phone, satellite and transmit/receive modules for phased array radar and power amplifiers. They may also find great use in collision avoidance applications. MIMICs typically are made up of GaAs FET amplifiers, resistors, capacitors stripline inductors and other elements. The microwave/ millimeter-wave monolithic integrated circuits program was initiated principally by the... 

GaAs MMICs Monolithic microwave integrated circuits have been fabricated using ion implantation. This renders feasible the fabrication of monolithic phased array radars. These circuits incorporate active devices, RF circuitry, and bypass capacitors (53-54). 

Abe, M., Itoh, T., Tamaura, Y. Gomi, M. (1988). Ferrite-organic multilayer film for microwave monolithic integrated circuits prepared by ferrite plating based on the spray-spin-coating method. Journal of Applied Physics, 63,3774-6. 

Bota, S. A., Dieguez, A., Merino, J. L., Casanova, R., Samitier, J. and Cane, C. (2004) A monolithic interface circuit for gas sensor arrays Control and measurement. Analog Integrated Circuits and Signal Processing, 40,175-184. 

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