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Glow discharge method

The radio-frequency glow-discharge method [30-34] has been the most used method in the study of a-C H films. In this chapter, it is referred to as RFPECVD (radio frequency plasma enhanced chemical vapor deposition). Film deposition by RFPECVD is usually performed in a parallel-plate reactor, as shown in Figure 1. The plasma discharge is established between an RF-powered electrode and the other one, which is maintained at ground potential. The hydrocarbon gas or vapor is fed at a controlled flow to the reactor, which is previously evacuated to background pressures below lO"" Torr. The RF power is fed to the substrate electrode... [Pg.222]

Glow-discharge methods need new developments or will go into decline. The greatest needs for GD methods are ... [Pg.651]

The emanation activity can be fixed on a Pt plate by the glow discharge method (179)-... [Pg.191]

Polymerized thin films have been formed by several methods such as glow discharge, photolysis, electron bombardment and vacuum evaporation. The films formed in a glow discharge are pinhole free and possess a number of unique and desirable properties. The glow discharge methods are also simpler than the other methods from a processing point of view. [Pg.65]

The growth rate of film formed by the direct glow discharge method has been explained on the basis of Christy s theory, taking into account the effect of ion transport. In the direct method the film is formed mostly by the bombardment of positive ions. [Pg.75]

Metal and metal alloy producers and materials research laboratories routinely use spark and arc emission spectrometry and GD spectrometry has been gaining in popularity because it can analyze nonconducting solids directly. It is difficult to make direct sensitivity and accuracy comparisons between AAS, ICP, ICP-MS, and the arc/spark/glow discharge methods, since the latter techniques have sensitivities based on solid samples (LODs in p-g/g) and the former are solution techniques (LODs in pg/mL). While the solution detection hmits of graphite furnace or ICP may appear to be better than arc/spark or GD, the actual dilution factor for a real solid sample needs to be considered to compare the techniques for analysis of solids. [Pg.532]

For modification of polymer/filler surfaces to improve properties like adhesion, fluid absorbancy and wetting properties "exposure of the surfaces to proper electrical glow discharge method is usually and succesfully employed. This technique can also be employed in polymer composite systems to modify interfaces and interphases to improve properties. [Pg.309]

An alternative plasma treatment teehnique is the glow discharge method that ean be done at atmospheric pressure. To generate the glow discharge, a pair of insulation-coated electrodes is placed apart at a predetermined distance inside a chamber connected to a gas inlet tube. The object being treated is moved between the electrodes, one of which is connected to a power... [Pg.457]

Modification of the polymer surface with chemical, radiation or glow discharge methods in order to create functional groups which -... [Pg.104]

An alternative plasma treatment technique is the glow discharge method that can be done at atmospheric pressure. Fluoroplastic films were treated by glow discharge in helium atmosphere. Strips of the treated and untreated films were bonded to 0.2-mm-thick aluminum foils using a urefliane adhesive cured at 100 °C for 15 min. The treatment conditions and bond strengths of the samples are given in Table 5.19. [Pg.70]


See other pages where Glow discharge method is mentioned: [Pg.225]    [Pg.51]    [Pg.430]    [Pg.36]    [Pg.224]    [Pg.30]    [Pg.236]    [Pg.147]    [Pg.65]    [Pg.261]    [Pg.89]    [Pg.8]    [Pg.40]   
See also in sourсe #XX -- [ Pg.36 ]

See also in sourсe #XX -- [ Pg.36 ]




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Atmospheric pressure glow discharge treatment method

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Radio-frequency glow-discharge method

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