Glass microchip fabrication microchips

Kikutani, Y., Hisamoto, H., Tokeshi, M., Kitamori, T, Fabrication of a glass microchip with three-dimensional channel network and its application to a single-chip combinatorial synthetic reactor, in Ramsey, J. M., VAN den Berg, A. (Eds.), Micro Total Analysis Systems, pp. 161-162, Kluwer Academic Publishers, Dordrecht (2001). 

Name three kinds of glass substrates commonly used to fabricate microchips. Describe the process of photolithography used in glass micromachining. (5 marks)... 

In fabricating a glass microchip, why are drilling and bonding required ... 

Interestingly, most research efforts with polymer microfluidic structures have focused on applying the same planar two-dimensional layouts of glass microchips in plastic devices. However, multilayer microstructures, wherein multiple channels can cross over one another without contamination, would significantly increase the operational flexibility in miniaturized analysis. Multilayer microfluidics have been fabricated in glass, and PDMS/glass hybrid microchips.However,... 

As glass and quartz exhibit the same surface property as fused-silica capillary, the monolithic materials could be conveniently prepared in a glass- or quartz-based microfluidic device via the same way of monoliths in the capillary. However, glass/quartz devices are rather expensive, and the need for specialized facilities for their fabrication with conventional photolithography technology hinders any rapid modification of the chip architecture. An attractive alternative is using a variety of polymeric materials, such as poly(dimethylsiloxane) (PDMS), poly(methyl methacrylate) (PMMA), polycarbonate (PC), and cyclic olefin copolymer (COC), to fabricate microchips for their mechanical and chemical properties, low cost, ease of fabrication, and high flexibility. 

Recently, a glass microimpinger on microchip for gas phase sampling of hydrogen cyanide has been designed and fabricated by Tipple... 

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