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Flow rate radio

Much research has been focused on reducing oxide and hydroxide formation in plasmas. Oxide formation depends on such experimental variables as injector flow rate, radio-frequency power, sampler skimmer spacing, sample orifice size, plasma gas composition, oxygen elimination, and solvent removal efficiencies. All of these variables can be adjusted to address specific oxide and hydroxide overlap problems. [Pg.156]

The optoelectronic properties of the i -Si H films depend on many deposition parameters such as the pressure of the gas, flow rate, substrate temperature, power dissipation in the plasma, excitation frequency, anode—cathode distance, gas composition, and electrode configuration. Deposition conditions that are generally employed to produce device-quahty hydrogenated amorphous Si (i -SiH) are as follows gas composition = 100% SiH flow rate is high, --- dO cm pressure is low, 26—80 Pa (200—600 mtorr) deposition temperature = 250° C radio-frequency power is low, <25 mW/cm and the anode—cathode distance is 1-4 cm. [Pg.359]

The inductively coupled plasma source (Fig. 20.11) comprises three concentric silica quartz tubes, each of which is open at the top. The argon stream that carries the sample, in the form of an aerosol, passes through the central tube. The excitation is provided by two or three turns of a metal induction tube through which flows a radio-frequency current (frequency 27 MHz). The second gas flow of argon of rate between 10 and 15 L min-1 maintains the plasma. It is this gas stream that is excited by the radio-frequency power. The plasma gas flows in a helical pattern which provides stability and helps to isolate thermally the outside quartz tube. [Pg.774]

A wide variety of parameters can directly affect the chemical and physical characteristics of a plasma, which in turn affect the surface chemistry obtained by the plasma modification. Some of the more important parameters include electrode geometry, gas type, radio frequency (0-10 ° Hz), pressure, gas flow rate, power, substrate temperature, and treatment time. The materials and plasmas used for specific biomedical applications are beyond the scope of this text, but the applications include surface modification for cardiovascular, ophthalmological, orthopedic, pharmaceutical, tissue culturing, biosensor, bioseparation, and dental applications. [Pg.811]

The basic set-up and compounds of an ICP-AES and ICP-MS are shown in Fig. 2. The ICP part is almost identical for AES and MS as detection principle. The ICP torch consists of three concentric quartz tubes, from which the outer channel is flushed with the plasma argon at a typical flow rate of 14 1 min-1. This gas flow is both the plasma and the cool gas. The middle channel transports the auxiliary argon gas flow, which is used for the shape and the axial position of the plasma. The inner channel encloses the nebulizer gas stream coming form the nebulizer / spray chamber combination. This gas stream transports the analytes into the plasma. Both the auxiliary and the nebulizer gas flow are typically around 1 1 min-1. The plasma energy is coupled inductively into the argon gas flow via two or three loops of a water-cooled copper coil. A radio frequency of 27.12 or 40.68 MHz at 1-1.5 kW is used as power source. The plasma is... [Pg.1000]

Factors that affect the rate of low-temperature ashing other than radiofrequency power and oxygen flow rate are the coal particle size and depth of sample bed. Typical conditions for ashing are a particle size of less than 80 mesh, a sample layer density of 30 mg/cm2, oxygen flow rate of 100 cm3/min, chamber pressure of about 2 torr, and a 50-W net radio-frequency power. The total time required is 36 to 72 hours, and specified conditions must be met during the procedure to obtain reproducible results. [Pg.103]

Step 7. Test your selected eluent in an aqueous system. Prepare a set of identical anion-exchange resin columns according to the article. Prepare a set of identical 1-L samples of tap water. Pipette into each sample 1 mL iodide carrier and 5 mL radio-iodine tracer and mix. Let samples flow through column at flow rate of no more than 5 mL per minute. Prepare 200 mL solutions of the selected eluting agents. [Pg.95]

When ammonia gas was introduced into an argon plasma jet at a flow rate of 60 seem, all argon emission lines disappeared, and a very short but brilliant light-blue flame was formed. A very strong NH emission band was observed. In the ammonia radio frequency plasma, some very weak N2 emission bands due to N2 second positive appeared, but in the ammonia flame formed in an argon plasma jet no emission related to N2 species was observed. [Pg.349]

The distribution of polymer deposition observed in the plasma polymerization of acetylene at different flow rates (and different system pressures under plasma conditions) is shown in Figure 20.2. It should be noted that acetylene is the fastest polymerizing hydrocarbon and the system pressure decreases on the inception of glow discharge. In this particular configuration of reactor, the monomer does not pass the radio frequency coil, and presents a typical case in which the creation of chemically reactive species occurs at the boundary where the monomer meets the luminous gas phase, i.e., activation by luminous gas, not by ionization. [Pg.424]

The effect of the addition of Freon 12 (CCI2F2) to ethylene at a flow rate of 2.5 seem is shown in Figure 20.7. The appearance of a maximum and the increase in its peak height with the partial pressure of the Freon is similar to the case of acetylene, but the half-widths of the peaks are much wider with ethylene. At higher flow rates of ethylene, however, the distribution pattern is quite different as depicted in Figure 20.8. The minimum observed with ethylene at a flow rate of 9.6 seem shown in Figure 20.5 is an indication of the existence of two peaks one at the upstream side toward the radio frequency coil and another at the downstream... [Pg.427]

Oxygen reactive-ion etching (O2 RIE) was carried out with a Cooke Vacuum Products (model C71-3) parallel-plate RIE reactor operating at 13.56 MHz. Oxygen pressure and flow rate were 2 Pa and 10 seem (standard cubic centimeters per minute), respectively, and the RF (radio frequency) power density and self-bias were 0.15 W/cm and -350 V, respectively. [Pg.696]

Sample Analysis. For analysis via radio gas chromatography the irradiated sample mixture was quantitatively transferred into a greaseless injection loop by means of a 1-L mercury Toepler pump. The chromatography column consisted of 150 ft of 0.25-in. o.d. stainless steel beverage tubing packed with 30 wt % of the crotonic acid ester of H(CF2)8CH20H coated upon 30/40 ASTM mesh Chromosorb PA solid support. The column was operated at 273 K with a helium carrier gas flow rate of 25 cm min" (NTP). [Pg.162]

Typical dasma polymerizafion conditions are defined by the W/FM parameter, which is expressed in units of MJ/kg. W/FM is the apparent electrical eneigy per mass ofmonomer input into the reactor [27]. W is the apparent radio fiequency power to sustain glow discharge in J/min. F is the flow rate ofthe monomer in mol/min, and M is the molecular mass of the monomer in kg/mol. W/FM values range from 50 MJ/kg to 100 MJ/kg. [Pg.258]

Nakagama T, Maeda T, Uchiyama K, Hobo T (2003) Monitoring nano-flow rate of water by atomic emission detection using helium radio-frequency plasma. Analyst 128(6) 543-546... [Pg.1174]

Piyasena, P. and Dussault, C. (2003) Continuous radio-frequency heating of a model viscous solution influence of active current, flow rate, and salt content on temperature rise. Canadian Biosystem Engineering, 45,327-334. [Pg.330]

Optimal parameters developed for one system usually cannot be adopted for another system. Because the plasma process is extremely complex, it is necessary to have very good control of the plasma parameters, such as radio frequency (RF), power level, gas flow rate, gas composition, gas pressure, sample... [Pg.162]


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See also in sourсe #XX -- [ Pg.319 , Pg.322 , Pg.348 ]




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