Columnar morphology development

In non-reactive sputter deposition, the properties of the film depend to a large extent on the gas pressure, which determines the thermalization of the reflected high energy neutrals and the sputtered species. The energy of the species striking the surface of the growing film affects the development of the columnar morphology, density, and residual film stress. 

A columnar morphology will develop on a smooth substrate surface as it roughens with film thickness due to preferential growth of crystal planes. If the surface is not smooth, the... 

In the sputter deposition of aluminum conductor materials for semiconductor devices, it has been shown that a small partial pressure of nitrogen during sputter deposition can have an effect on the electromigration properties of the deposited aluminum film. In the case of reactive deposition, the residual gas partial pressure is high and has a major effect on the surface mobility and the development of columnar morphologies, even at high deposition temperatures. 

The development of the columnar morphology may be disrupted by mechanical means. 

Angle-of-incidence effect (film growth) The effect of the angle-of-incidence of the adatoms on the development of a film-morphology. See also Columnar morphology. 

Macrocolumnar morphology (film formation) The large-sized columnar morphology that develops due to the initial surface features of the substrate. See also Columnar morphology. 

Columnar cells with nuclei at varied distances from the luminal border were distinguished throughout fetal development, as in adults. Functional interpretation of these cells is beyond the scope of this study. However, columnar cells of different morphological types have been described previously in adults, and certain columnar cells (with short microvilli) have been suggested as potential receptors (Moran et al., 1991, 1995). Further investigation is clearly needed on the apical characteristics of VNO columnar cells. For example, the present investigation and some previous studies (Johnson et al., 1985 Sten-saas et al., 1991) have noted some cilia in the adult human VNO. The precise distribution of these ciliated cells is important, since the non-sensory, receptor-free epithelium of the VNO of other mammals (Briepohl et al., 1979) also possess cilia. 

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