Reflected high energy neutrals

In non-reactive sputter deposition, the properties of the film depend to a large extent on the gas pressure, which determines the thermalization of the reflected high energy neutrals and the sputtered species. The energy of the species striking the surface of the growing film affects the development of the columnar morphology, density, and residual film stress. 

Ion neutralization spectroscopy. f Reflection high energy electron diffraction. 

Fig. 1. Experimental techniques available for surface studies. SEM = Scanning electron microscopy (all modes) AES = Auger electron spectroscopy LEED = low energy electron diffraction RHEED = reflection high energy electron diffraction ESD = electron stimulated desorption X(U)PS = X-ray (UV) photoelectron spectroscopy ELS = electron loss spectroscopy RBS = Rutherford back scattering LEIS = low energy ion scattering SIMS = secondary ion mass spectrometry INS = ion neutralization spectroscopy.

Above ionization limits, lines in the absorption spectrum are often broad or diffuse. This diffuse character results from an interaction of a very highly excited neutral molecule state, AB, with the continuum of an ionized molecule, AB+, plus an electron. This continuum reflects the fact that the electron can be ejected from the molecule over a continuous range of kinetic energy ... 

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