BioMEMS microfluidics

BioMEMS Microfluidics Nanofluidics Preparatory separation Sample pre-fractionation... 

Shape optimization of microfluidic structures is a challenging problem, where MOR is strongly desired to reduce the computational complexity during iterations. Utilization of reduced order models for shape optimization in microfluidic devices has been explored recently. Antil et al. [15] combined the POD and the balanced truncation MOR methods for shape optimization of capillary barriers in a network of microchannels. Ooi [9] developed a computationally efficient SVM surrogate model for optimization of a bioMEM microfluidic weir to enhance particle trapping. 

Future markets for biomedical microdevices for human genome studies, drug discovery and delivery in the pharmaceutical industry, clinical diagnostics, and analytical chemistry are enormous (tens of billions of U.S. dollars).In the following sections, major bioMEMS applications and microfluidics relevant to bioMEMS applications are briefly introduced. Because of the very large volume of publications on this subject, only selected papers or review articles are referenced in this entry. 

Microfluidics is the manipulation of fluids in channels, with at least two dimensions at the micrometer or submicrometer scale. This is a core technology in a number of miniaturized systems developed for chemical, biological, and medical applications. Both gases and liquids are used in micro-/nanofluidic applications, ° and generally, low-Reynolds-number hydrodynamics is relevant to bioMEMS applications. Typical Reynolds numbers for biofluids flowing in microchannels with linear velocity up to 10 cm/s are less than Therefore, viscous forces dominate the response and the flow remains laminar. 

Ziaie, B., Baldi, A., Lei, M.. Gu, Y.D., and Siegel, R.A. (2004) Hard and soft micromachining for BioMEMS review of techniques and examples of applications in microfluidics and drug delivery. Advanced Drug Delivery Reviews, 56 (2), 145-172. 

C. Gartner, R. Klemm, and H. Becker, Methods and instruments for continuous flow PCR on a chip, Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems, 6465, 646502, 2007. 

BioMEMS) Droplet microfluidics Micro fluo-rescently activated cell sorting (pFACS) Micro total analysis system (pTAS) pTAS... 

Woias P (2001) Micropinnps - siunmarizing the first two decades, microfluidics and BioMEMS. Proc SPIE 4560 39-52... 

Okandan M et al (2001) Development of surface micromachining technologies for Microfluidics and BioMEMS. In SPIE micromachining and microfab-lication conference, San Francisco... 

Jaffer S, Gray BL (2007) Mechanically assembled polymer interconnects with dead volume analysis for microfluidic systems. Proc SPIE Microfluid BioMEMS Med Microsyst 6465 1-12... 

Becker H, Beckert E, Gartner C (2010) Hybrid tooling technologies for injection molded and hot embossed polymeric microfluidic devices. Proc SPIE 7593 Microfluid BioMEMS Med Microsyst VIII 75930B l-5... 

To date, the thermocapacitive flow sensor has only been demonstrated in the semiconductor field for measuring the gas flow rate. Many microfluidic chips and most BioMEMS chips work with a liquid medium. Possible future work includes applications of the thermocapacitive flow sensor in a liquid medium, where electrical insulation would be required. 

Lai, S., Lee, L. J., Yu, L., KoelUng, K. W., Madou, M. J., in Micro- and nano-fabrication of polymer based microfluidic platforms for bioMEMS applications. Materials Research Society Symposium Proceedings, 17—27 (2002). 

This chapter presents a literature survey of the applications of porous silicon in BioMEMS (biological/biomedical microelectromechanical systems). This material possesses properties particularly suitable for biomedical purposes biocompatibility, biodegradability, photoluminescence, ability to precisely control the pore size and shape, and possibility to easily modify the surface chemistry. Many applications can, for instance, be found in the fields of sensing and delivery of therapeutics. It is expected that the number of BioMEMS using porous silicon will continue to increase in the future with the development of lab-on-a-chip/microfluidic devices. 

Besides these aforementioned applications, porous silicon can also be used as part of a chip-based system, providing different functionalities. Table 2 presents those BioMEMS applications, including microfluidic applications (Abgrall and Gue 2007). 

Hydrophobic siloxane monolayers are effective at preventing capillary adhesion in MEMS operating in ambient air. However, the use of SAMs to prevent stiction in harsh environments (elevated temperature or fluids) has been investigated to a lesser extent. Packaging or specific application conditions can expose MEMS to elevated temperatures. Similarly, the advent of bioMEMS and microfluidic devices opens the door to a wide range of applications in liquid environments. 

Droplet microfluidics Micro total analysis system ( xTAS) xTAS Bio-MicroElectroMechanical systems (BioMEMS) Micro fluorescently-activated cell sorting (ixFACS)... 

Becker, H., Miihlberger, H., Hoffmann, W. et al. (2008) Portable CE system with contactless conductivity detection in an injection molded polymer chip for on-site food analysis. Proc.SPIE, Microfluidics, BioMEMS, and Medical Microsystems VI, 6886, 68860C. 

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