Nano-fabrication

The next two chapters concern nanostructured core particles. Chapter 13 provides examples of nano-fabrication of cored colloidal particles and hollow capsules. These systems and the synthetic methods used to prepare them are exceptionally adaptable for applications in physical and biological fields. Chapter 14, discusses reversed micelles from the theoretical viewpoint, as well as their use as nano-hosts for solvents and drugs and as carriers and reactors. 

Last, but by no means least, reference should be made to the use of proteins in nano-fabrication [492]. One approach is illustrated by the fabrication of a 1-nm-thick metal film with 15-nm-diameters holes, periodically arranged on a triangular protein lattice [493]. Advantage was taken of the 10-nm-thick, uniformly porous surface (or S) layer of the crystalline protein obtained from the thermophilic bacterium Sulfolobus acidocaldarius. The protein was adsorbed from a dilute solution onto a molecularly smooth carbon-film surface, metal coated by evaporation, and ion milled to give spatial ordering of holes with the same nanometer periodicity as the protein lattice [493]. 

Di Fabrizio, E., et al. (2004), X-ray lithography for micro- and nano-fabrications at ELETTRA for interdisciplinary applications, J. Phys. Condens. Matter, 16, 3517-3535. 

Kumar, C. S. S. R., Hormes, J., and Leuschner, C. (2005), Nano fabrication Towards Biomedical Applications Techniques, Tools, Applications, and Impact, Wiley, Hoboken, NJ. 

Shen, C. (2008) Self-assembled Monolayers of Thiolates as Templates for Micro/Nano Fabrication, PhD thesis, University of St Andrews, St Andrews, UK. 

The demonstration of nano fabrication on semiconductive electrodes was reported as early as in 1990 by Nagahara et aL These anthors fabricated nanostmctnres on Si(lOO) and GaAs(lOO) surfaces via local etching by maintaining a tip-surface bias and tunneling current. They observed nanostructures 20-nm wide and 1.5-nmdeep. 

Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices... 

In this session, micro direct methanol fuel cells (DMFC) fabricated by Si MEMS and plastic MEMS are described. For examples of micro/nano fabrication technologies, fine micro plastic fluidic chips fabricated by molding and low temperature bonding are reported. The 3-D metal micro mesh electrode fabricated by simple UV photolithography is described next. For an example of micro flow devices, the pneumatically actuated microvalve and the microreactor having multireagent inlets are introduced. 

Besides the use in F2 and F2 immersion lithography, fluoropolymers are used in various fields. Fluoropolymer is one of the candidate for a polymer for MEMS, and fabrication of fluoropolymers by ultra-short pulsed lasers (9), and synchrotron radiations (10) has been studied. Polymer outgassing as well as the micro- and nano-fabrication depends on the polymer radiolysis. It is important for the micro- and nano-fabrication to investigate outgassing characteristics which is obvious outcome in the polymer radiolysis. 

Ali, Hung and Yongyi (2010) reviewed the application of focused ion beam (FIB) sputtering for micro/nano fabrication. Although less relevant for discussion of bioceramic coatings, treatment of basic principles of FIB, and evaluation of empirical and fundamental models for sputtering yield, material removal rate and surface roughness were presented and compared. Fabrication of various micro- and nanostructures was discussed. 

I. Brodie and J. J. Muray, The Physics of Micro/Nano-Fabrication. Plenum, New York, 1992. 

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