Magnetron discharge anode

Anode magnetron discharge (C-AM), where a planar cathode without magnetron (C) is used against a magnetron anode (AM). 

Figure 15.10 The distribution profile of in the interelectrode space on the center plane in the C-AM mode (anode magnetron) discharge 2 seem, SOmtorr, 10 W, electrode separation distance 76 mm.

Can the anode magnetron be used in the precleaning process of the metallic substrate that is used as the cathode in the cathodic plasma polymerization In a more broad sense, can the surface of metal (cathode) be cleaned by argon direct current (DC) discharge sputtering ... 

Figure 15.2 Schematic view of anode-magnetron DC glow discharge of argon in the interelectrode space, interelectrode distance 102 mm the luminous regions are shown shaded.

Comparison of Cathode Magnetron, Anode Magnetron, Nonmagnetron Discharges... 

Figure 15.12 Electron temperature and electron density as a function of axial distance (from cathode surface) for two radial positions, = 0 and 7 = 4.5 cm, in anode magnetron DC glow discharge of Ar 10 W, 2 seem, SOmtorr, 76 mm electrode distance.

Figure 15.16 Comparison of radial distribution of electron temperature and electron density at 2.5 mm axial position in anode magnetron, cathode magnetron and nonmagnetron DC glow discharge of Ar lOW, 2 seem, SOmtorr, and 240 G (anode and cathode magnetron).

Figure 15.18 Influence of magnetic field strength on axial distribution of electron temperature and electron density, at center radial position, of an anode magnetron DC glow discharge of Ar 800 V, 2 seem, 50 mtorr.

Figure 15.20 Effect of anode magnetron in DC discharge cleaning of the cathode surface by argon discharge 2 seem, SOmtorr, and 76 mm interelectrode distance.

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