Anode Magnetron for Cathodic Polymerization

ANODE MAGNETRON FOR CATHODIC POLYMERIZATION 4.1. Effect of Magnetic Field Configuration 

In plasma polymerization, the character of the dissociation glow that occurs near the surface of the cathode is more important than ion bombardment in determining the deposition rate and its distribution described in previous chapters. The edge effect seems to be less pronounced in LCVD than in the sputtering of the cathode material. The anode magnetrons seem to overcompensate the edge effect in LCVD. 

The effects of anode magnetron in sputter cleaning and in cathodic plasma polymerization could be summarized as follows. 

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