Magnetron torch, anode

Probably the most important aspect that has not been examined so far is the capability of the process to scan a larger surface area without creating a specific reactor for substrates with specific size and shape. One potentially important aspect of anode magnetron torch (AMT) is the capability to scan a larger surface area without creating a large surface anode to treat differently sized substrates (used as the cathode of DC discharge). 

---

Figure 17.2 A schematic diagram of the anode magnetron torch (AMT).

---