Advanced plasma source

Advanced plasma source LEYBOLD APS in the open coating chamber... 

Maurice H. Francombe and John L. Vossen, Physics of Thin Films, Advances in Research and Development, Plasma Sources for Thin Film Deposition and Etching,yo ivat 18, 1994. 

There are as yet no signs that the development of mass spectrometry is slowing down. This has consequences for the analyst. Whereas in the past the practitioner of polymer/additive analysis primarily benefited from a good knowledge of chromatography, it is now essential that such analytical scientists are conversant with current MS theory and practice. Advances in MS are due to new conceptual design, new ionisation methods (e.g. switched plasma sources) and... 

Fig. 17. Advance of a passivated region into silicon uniformly doped with 5 x 1018 boron atoms per cm3, after exposure for 30 min. at about 150°C to atomic deuterium from a plasma source (Johnson, 1985a). (a) Spreading resistance profile, (b) Depth distribution of total deuterium and of boron from SIMS.

Hund M, Herold H (2007) Design of a scanning probe microscope with advanced sample treatment capabilities an atomic force microscope combined with a miniaturized inductively coupled plasma source. Rev Sci Instrum 78(6) 063703... 

Atomic emission spectrometry (AES) is also called optical emission spectrometry (OES). It is the oldest atomic spectrometric multielement method which originally involved the use of flame, electric arc or spark excitation. Recently there has been considerable innovation in new sources plasma sources and discharges under reduced pressure. Littlejohn et al. (1991) have reviewed recent advances in the field of atomic emission spectrometry, including fundamental processes and instrumentation. 

Figure 28-7 Inductively coupled plasma source. (From V. A. Fassel, Science, 1978, 202, 185. Reprinted with permission. Copyright 1978 by the American Association for the Advancement of Science.)...

This article is concerned with the developments in instrumentation and techniques in photochemistry and spectroscopy during the period July 1980— June 1981. Such a wide ranging topic is impossible to review at all critically, nor is it feasible to consider every publication concerning photochemical instrumentation. Consequently, many reports concerned merely with the application of established techniques have been omitted. In this respect, it should be noted that the relative brevity of some sections (for example plasma sources, u.v.-visible spectroscopy) in no way reflects the use or application of these techniques, but merely their advanced state of development. Further it is apparent that, during the past decade, a swing away from developments in instrumentation for conventional photochemistry in favour of spectroscopy and laser photochemistry has occurred. This has been reflected in the following discussion. The author would like to thank Dr. Mike West for several helpful discussions during the preparation of this manuscript. 

Kushner, M. J. (Ed.) (1994). Proceedings of the NATO Advanced Research Workshop on Formation, Transport, and Consequences of Particles in Plasmas, Chateau de Bonas, 1993, published in Plasma Sources Sci. Technol. 3, 239. 

N. Benjamin, B. Chapman, and R. Boswell, Progress of an advanced diffusion source plasma reactor, Proc. SPIE 1392, 95 (1990) M.W. Horn, M.A. Hartney, and R.R. Kunz, Comparison of etching tools for resist pattern transfer, Proc. SPIE 1672, 448 (1992) S.C. Pahnateer, R.R. Kunz, M.W. Horn, A.R. Forte, and M. Rothschild, Optimization of a 193 nm silylation process for sub... 

The ECRIS is the most popular ion source today. It is able to produce highly charged plasmas and ion beams from a wide variety of elements with high intensity both in continuous and pulsed modes. The most advanced ECR sources produce more than 1 mA of middle-charged heavy-ion... 

The sample materials from which proteins for proteomics studies may be extracted include fresh or snap-frozen cells from varied sources such as biological fluids, (serum, urine, plasma) and solid tissues such as biopsy specimens. Moreover, proteins isolated from ethanol-fixed paraffin-embedded tissues can be utilized for MS analysis.2 Protocols for the identification of proteins from formalin-fixed paraffin-embedded (FFPE) tissues have been recently developed.3 4 FFPE materials are the most common forms of biopsy archives utilized worldwide, and represent an important advancement for the large-scale interrogation of proteins in archival patient-derived materials. Finally, laser capture microdissected tissues have been successfully used for MS analysis.45... 

Advances in TIMS-techniques and the introduction of multiple collector-ICP-MS (MC-ICP-MS) techniques have enabled the research on natural variations of a wide range of transition and heavy metal systems for the first time, which so far could not have been measured with the necessary precision. The advent of MC-ICP-MS has improved the precision on isotope measurements to about 40 ppm on elements such as Zn, Cu, Fe, Cr, Mo, and Tl. The technique combines the strength of the ICP technique (high ionization efficiency for nearly all elements) with the high precision of thermal ion source mass spectrometry equipped with an array of Faraday collectors. The uptake of elements from solution and ionization in a plasma allows correction for instrument-dependent mass fractionations by addition of external spikes or the comparison of standards with samples under identical operating conditions. All MC-ICP-MS instruments need Ar as the plasma support gas, in a similar manner to that commonly used in conventional ICP-MS. Mass interferences are thus an inherent feature of this technique, which may be circumvented by using desolvating nebulisers. 

Actinide metal samples are characterized by chemical and structure analysis. Multielement analysis by spark source mass spectrometry (SSMS) or inductively coupled argon plasma (ICAP) emission spectroscopy have lowered the detection limit for metallic impurities by 10 within the last two decades. The analysis of O, N, H by vacuum fusion requires large sample, but does not distinguish between bulk and surface of the material. Advanced techniques for surface analysis are being adapted for investigation of radioactive samples (Fig. 11) ... 

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