The Continuous Compositional Spread CCS Approach

A final advantage of the cosputtered CCS approach is that rf bias, typically 10 W, under independent control can be supplied to the substrate as indicated in the schematic diagram (Fig. 10.2). We speculate that the role of substrate bias is to increase surface mobility during film growth. This changes the microstructure and decreases the defect density of the as-grown film, which is related to the leakage behavior of 

Systematized Search for a New High-s Thin-film Material 10.3.r 

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In this artide, we review the new field of combinatorial materials science. We describe in detail our particular materials exploration approach that we call the continuous compositional spread (CCS) approach. This CCS approach allows the synthesis and characterization of a major fraction of a ternary or pseudo-ternary phase spread in about 24 hours. We compare the CCS approach with other schemes for rapid materials investigations. We also provide an example of the successful application of the CCS approach in the discovery of a new high dielectric constant thin-film material, an amorphous zirconium tin titanate, aZTT. New combinatorial approaches to materials research can allow us to do studies that would not have been possible using conventional techniques. 

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