Spray pyrolysis metal deposition

Silver(I) /3-diketonate derivatives have received significant attention due to the ease with which they can be converted to the elemental metal by thermal decomposition techniques such as metal organic chemical vapor deposition (MOCVD).59 The larger cationic radius of silver(I) with respect to copper(I) has caused problems in achieving both good volatility and adequate stability of silver(I) complexes for the use in CVD apparatus. These problems have been overcome with the new techniques such as super critical fluid transport CVD (SFTCVD), aerosol-assisted CVD (AACVD), and spray pyrolysis, where the requirements for volatile precursors are less stringent. 

Films at NASA GRC were deposited using homemade spray or aerosol-assisted chemical vapor deposition (AACVD) reactors to exploit the lower deposition temperature enabled by the simpler decomposition chemistry for the SSPs.6 9 AACVD is a simple and inexpensive process that offers the advantage of a uniform, large-area deposition, just like metal organic CVD (MOCVD), while also offering the low-temperature solution reservoir typical of spray pyrolysis methods. 

Xie Y, Neagu R, Hsu CS, Zhang X, and Deces-Petit C. Spray pyrolysis deposition of electrolyte and anode for metal-supported solid oxide fuel cell. J. Electrochem. Soc. 2008 155 B407-B410. 

Spray pyrolysis An appropriate metal salt is sprayed from an atomizer onto a hot substrate where decomposition occurs yielding the metal oxide. There are advantages to be gained by electrically charging the droplets using an electrostatic atomizer Deposition rates are quite low, typically in the range 1-10 /unh-1. 

In this section various existing lanthanide and actinide metal-organic enolate precursors for rare earth metal oxide deposition are discussed and the rationale of their selection is addressed. CVD, ALD and ultrasonic spray pyrolysis (USP) of the lanthanide or actinide enolate starting materials has been carried out under a variety of conditions as can be seen from Table 7. 

The adsoqjtion of NO on metal loaded ceria has been examined for Pt, and Pd, As known from work on single crystals, NO dissociates to some extent on each of these metals. The amount of dissociation is dependent upon the structure of the metal surface. Gorte considered Pt and Pd particles deposited on rough, poly crystal line ceria films grown by spray pyrolysis.For Pt they found variation in the TPD results (amount of NO uptake and shape of N2 desorption profile) that varied with the size of the Pt particles. However, the results were comparable to NO TPD results from Pt grown on sapphire. It was concluded that no unusual interaction existed between Pt and the (oxidized) ceria. For Pd it was found that a pronounced difference in the TPD product ratio, NO/N2, occurred for Pd on ceria compared to Pd on sapphire. They attributed the difference to NO adsorption on reduced ceria. 

In the first chapter of this book, an overview of CVD techniques has been given, and more detailed descriptions can be found in several textbooks [9, 10]. Many different CVD reactors have been used for the deposition of conducting films, i.e., thermal, UV-enhanced CVD (UVCVD), laser-assisted CVD (LACVD), plasma-enhanced CVD (PECVD) and metal-organic CVD (MOCVD). In addition, two techniques were included, which are not typically part of CVD, chemical transport and spray pyrolysis. 

In spray pyrolysis, a solution of metal complexes is sprayed directly or via aerosol formation onto the substrate. Complicated reactions between precursors and molecules of the solution occur finally before forming the deposit. It is difficult to separate the work on spray pyrolysis from CVD, because the borderline between aerosol CVD and spray pyrolysis is not well defined and, therefore, the latter was included in this report. 

Sn02 has been one of the most attractive metal oxides in the experimental studies during the last decades due to its gas sensor and catalysis application. Various methods were tested for deposition of SnOz films. They were fabricated by sputtering, sol-gel, spray pyrolysis, CVD, ALE, thermal evaporation, etc. However, not all methods are able to produce Sn02 films with high porosity and small size of crystallites (/<10 nm). 

Spray pyrolysis (Fig. 13.3) is a technique similar to AACVD, where the precursors for the metal oxide film are aerosolized and sprayed on to the target substrate. The deposited droplets then react on the surface when the substrate is heated, forming the desired film. 

The basic approach to classify powder production methods is based on whether a method is top-down or bottom-up. In a top-down method, micro- and nano-particles are produced due to the stracture and size refinement through the breakdown of the larger particles in a bottom-up method, the mechanism of particle formation is usually by means of nucleatimi, growth and aggregation of atoms and molecules. In a more practical approach, one may divide the powder synthesis methods as follows (1) wet chemistry, such as the chemical precipitation, sol-gel, microemulsion, sonochemistry, and hydrothermal synthesis methods (2) mechanical attrition, grinding and milling (3) gas phase methods, such as the chemical and physical vapor deposition (4) liquid phase spray methods, such as the molten metal spray atomization, spray pyrolysis, and spray drying, and (5) liquid/gas phase methods. 

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