Selectivity semiconductor corrosion

Corrosion. Copper and selected copper aHoys perform admirably in many hostile environments. Copper aHoys with the appropriate corrosion resistance characteristics are recommended for atmospheric exposure (architectural and builder s hardware), for use in fresh water supply (plumbing lines and fittings), in marine appHcations (desalination equipment and biofouling avoidance), for industrial and chemical plant equipment (heat exchangers and condensers), and for electrical/electronic appHcations (coimectors and semiconductor package lead-frames) (30) (see Packaging). 

In a subsequent work [182], it was shown that the photoelectrochemical performance of InSe can be considerably improved by means of selective (photo)electrochemical etching. Interestingly, whereas the cleavage vdW plane showed little improvement, the photocurrent in the face parallel to the c-axis was doubled. Note that, in contrast to InSe crystals cleaved in the plane perpendicular to the c-axis that are almost defect free, the crystals cut in the plane parallel to the c-axis contain a high density of defects on their surface which leads to a high rate of electron-hole recombinations and inferior quantum efficiency. The asymmetry in the role of electrons and holes, as manifested, e.g., in the fact that surface holes carry out the selective corrosion of the semiconductor surface in both cleavage orientations, was discussed. 

Fig. 5.13 Energy level diagram comparing the surface band edge positions of SnS and the energies corresponding to selected redox couples and corrosion reactions involving the semiconductor. (Reproduced from [198])...

As chlorine trifluoride is a corrosive gas, suitable conditions must be selected in each cleaning process from a sufficient study on the corrosion-resistances of materials used in the CVD system, the characteristics of the semiconductor materials etched by chlorine trifluoride and so on. 

In the next sections we discuss some selected examples of the use of ATR spectroscopy to study semiconductors, polymers, and corrosion processes. 

Ion-Selective Field Effect Transistors. Ion-selective field effect transistors (ISFETs) are semiconductor devices related to the solid-state detectors used in spectroscopy (discussed in Chapter 5). In this case, the surface of the transistor is covered with silicon nitride, which adsorbs H ions from the sample solution. The degree of adsorption is a function of the pH of the sample solution and the adsorption of H" " ions results in a change in the conductivity of the ISEET channel. The cell requires an external reference electrode. ISEET pH sensors can be made extremely small (about 2 mm ) and are extremely rugged, unlike the fragile glass bulb pH electrode. They have rapid response times and can operate in corrosive samples, slurries, and even wet solids such as food products. The sensor can be scrubbed clean with a toothbrush, stored in a dry condition, and does not require hydrating... 

There is a vast amount of literature on the subject of impedance measurements comprising a large number of different applications, such as corrosion, characterization of thin films and coatings, batteries, semiconductor electrodes, sensors, biological systems, and many more. It is beyond the scope of this article to cover all of these applications comprehensively. This chapter, therefore, concentrates on the description of the main principles and theories and selected applications of impedance methods. A more thorough treatment of the subject from the point of view of corrosion can be found in [1, 2], impedance spectroscopy of solid systems is described in [3]. The fundamentals of impedance spectroscopy of electrochemical systems are also explained in [4, 5]. 

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