Processing, MEMS based sensors

Almost all types of sensors can be attached to such a sensor node as long as the power consumption is in relation to the purpose of the sensing system. Low-power sensors are first choice and that is the reason why micro-sensors called MEMS (micro electro-mechanical systems) are very attractive to be combined with such a system. MEMS are small integrated devices combining electrical and mechanical components that could be produced for about 50 each. Because the process elements and internal linkage movements are now small, these MEMS-based transducers consume very little power. The low cost, low power and small size of MEMS-based transducers have revolutionized the way we can measure. This includes also the combination of sensor data and the formation of networks of sensors as well as combination with low power video techniques (VSLI cameras). 

In order to evaluate applicability of both the FOG-based IMAR IMU and the MEMS-based ADIS IMU for this application we have chosen first a static scenario (vessel moored). Within the initialization phase we firstly determined the actual sensor biases and then started the strapdown processing for the orientation only by using the GNSS Compass attitude as a starting point. 

There are more issues and complexity to be considered if various micro-electromechanical (MEMS)-type devices are included in the macroelectronics tool kit. As described previously, the materials and devices required for TFTs and circuits can provide adequate electromagnetic (visible and RF) sensitivity for many image-type applications. These materials may also provide satisfactory performance in pressure and strain sensors. Nanotube/nanowire-based devices look promising for various chem-bio sensors.85 However, there is little that is known about the ability to integrate printed microfluidic devices (and other such devices with moving parts) into a roll-to-roll-type process. 

Many technologies have been developed to monitor or measure fluid flow in microdevices. The underlying mechanisms of these devices are based mainly on thermal or mechanical principles examples of the variables to be measured are temperature, differential pressure, and drag force, which translate to thermal changes, deflection of cantilever beams, and shear strain, respectively. Most of these microflow sensors are manufactured by microelectromechanical systems (MEMS) processes without moving parts, and the flow rate measurements are mainly translated from velocity detection. For example, because flows in microchannels are in most... 

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