Piezoelectric characterization at nano scale of ferroelectric thin films

2 Piezoelectric characterization at nano scale of ferroelectric thin films 

There are two main approaches or configurations for the AFM-assisted detection of the local piezoelectric activity (pfm) in ferroelectric thin films for ferroelectric memory applications (FeRAM). The most used one was introduced in the early 90s and uses a conductive afm-tip as both top electrode and sensor for the induced vibration [2-4]. The second and more recent one [15,16], uses a normal metallic thin top electrode to apply the electric field and the vibration signal is detected by the AFM-tip above the top electrode. Both approaches present numerous advantages and disadvantages, as widely discussed in the literature, and are quite complementary. 

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