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Isolation oxide

Figure 9 shows a simplified fabrication sequence for an oxide-isolated -weU CMOS process that illustrates many of the essential steps used in IC manufacture. These steps are as follows ... [Pg.353]

Fig. 9. Fabrication sequence for an oxide-isolated -weU CMOS process, where is boron and X is arsenic. See text, (a) Formation of blanket pod oxide and Si N layer resist patterning (mask 1) ion implantation of channel stoppers (chanstop) (steps 1—3). (b) Growth of isolation field oxide removal of resist, Si N, and pod oxide growth of thin (<200 nm) Si02 gate oxide layer (steps 4—6). (c) Deposition and patterning of polysihcon gate formation of -source and drain (steps 7,8). (d) Deposition of thick Si02 blanket layer etch to form contact windows down to source, drain, and gate (step 9). (e) Metallisation of contact windows with W blanket deposition of Al patterning of metal (steps 10,11). The deposition of intermetal dielectric or final... Fig. 9. Fabrication sequence for an oxide-isolated -weU CMOS process, where is boron and X is arsenic. See text, (a) Formation of blanket pod oxide and Si N layer resist patterning (mask 1) ion implantation of channel stoppers (chanstop) (steps 1—3). (b) Growth of isolation field oxide removal of resist, Si N, and pod oxide growth of thin (<200 nm) Si02 gate oxide layer (steps 4—6). (c) Deposition and patterning of polysihcon gate formation of -source and drain (steps 7,8). (d) Deposition of thick Si02 blanket layer etch to form contact windows down to source, drain, and gate (step 9). (e) Metallisation of contact windows with W blanket deposition of Al patterning of metal (steps 10,11). The deposition of intermetal dielectric or final...
Fig. 8-7. Calibration of x-ray intensities for pure metal and for oxide isolated from Type 304 stainless steel. (Courtesy of Rhodin, Anal Chem., 27, 1857.)... Fig. 8-7. Calibration of x-ray intensities for pure metal and for oxide isolated from Type 304 stainless steel. (Courtesy of Rhodin, Anal Chem., 27, 1857.)...
Fig. 9.4. One pure antiestrogen, ICI 182780, increased the resistance of LDL particles to oxidation. Isolated LDL particles were subjected to oxidation by copper, and the lag time to oxidation, as measured by changes in optical density, increased as a function of the concentration of ICI 182780 (upper panel). The increase in the lag time (min) determined by the different concentrations of ICI 182780 is shown in the lower panel... [Pg.226]

On addition of S04 to the triple bond in the lO-member cycloalkyne 24 and cyclo-aUcynone 27, a nonchain, and anionic, self-terminating radical cyclization cascade is induced. In the former reaction (equation 22) the bicyclic ketones 25 and 26 are formed, and in the latter reaction (equation 23) the a,/3-epoxy ketones 28 and 29 are formed in good yields. Because of the difficulty of oxidizing isolated triple bonds, 804 does not react as an electron-transfer reagent in these reactions but acts as a donor of atomic oxygen. [Pg.1013]

The study of manoyl oxide derivatives i.e. 7 and 8 in, Fig (7), (i.e ent-hydroxy and en/-acetoxy-3(3-manoyl oxides) isolated from Cistus creticus, by GC-MS resulted in only one peak indicative of the purity of the products [33]. From the H-NMR data it is clear that the 13-epi isomer was present in both derivatives [58,139]. The chromatographic data of the compounds 7 and 8 were recently published [33,63]. Hence, investigations have proven that, apart from the 13-epi isomer, there are more isomers with varying intensities, which correspond to isomers that arise from the different configuration of C-8 chiral center [33]. This isomer showing a different configuration at C-8 has been isolated from the volatile leaf oil of Alaska (yellow) cedar and its structure has been confirmed using spectroscopic methods as well as chemical reactions [150],... [Pg.256]

Figure 10. Top, three-dimensional view of an oxide-isolated bipolar transistor. (Reproduced with permission from reference 13. Copyright 1988 McGraw-Hill.) Bottom, schematic of a common base n-p-n transistor circuit. Abbreviations are defined as follows n-epi, n-type-doped epitaxial-grown silicon and p-CHAN-STOPy p-type channel stop. Figure 10. Top, three-dimensional view of an oxide-isolated bipolar transistor. (Reproduced with permission from reference 13. Copyright 1988 McGraw-Hill.) Bottom, schematic of a common base n-p-n transistor circuit. Abbreviations are defined as follows n-epi, n-type-doped epitaxial-grown silicon and p-CHAN-STOPy p-type channel stop.
It was possible, however, to obtain a small yield of the expected phosphine oxide (isolated as the phosphinic acid) by converting di-o-tolylamine to the corresponding phosphoramidous dichloride, (o-MeC Ity NPC, dehydrohalogenating the latter substance, and treating the reaction mixture with water. [Pg.292]

Notes Jsyn-2-allyl-2-propionyl-1, 3-dithiane 1-oxide isolated (78%). 6Uncyclized haloalkylated material isolated (64%). [Pg.141]

The reaction of ozone with these tertiary amines is very rapid, but the addition of ozone is not stoichiometric About 1.2 to 1.7 moles of ozone per mole of the tertiary amine were used. The yields of the amine oxides, isolated as the picrates, were about 50% of theory. [Pg.203]

The structure of (+)-ficuseptine-A (15), Fig, (5), a new phenanthroindolizidine N-oxide isolated from leaf extracts of Ficus septica, was elucidated by means of comprehensive spectroscopic methods [3]. The relative stereochemistry was deduced from NOE correlations, while the (13aS) absolute configuration was inferred from a positive optical rotation at the sodium D line and a positive Cotton effect at 265 nm, a well-established correlation in this alkaloid series. Seven known alkaloids were also isolated in this investigation, including (+)-... [Pg.14]

Subbanagounder, G., A.D. Watson, and J.A. Berliner Bioactive products of phospholipid oxidation isolation, identification, measurement and activities. Free Radic. Biol. Med. 28... [Pg.349]

A microcircuit may be described as a collection of devices each consisting of an assembly of active and passive components, interconnected within a monolithic block of semiconducting material [4]. Each device is required to be isolated from adjacent devices in order to allow for maximum efficiency of the overall circuit. Furthermore within a device, contacts must also be electrically isolated. While there are a number of methods for isolating devices in a circuit (reverse-biased junctions, mesa isolation, use of semi-insulating substrates, and oxide isolation), the isolation of active components of a single device is almost exclusively accomplished by the deposition of an insulator. [Pg.263]

Artaud, L, L. Devocelle, J.-P. Battioni, J.-P. Girault, and D. Mansuy (1987). Suicidal inactivation of iron porphyrin catalysts during alk-l-ene oxidation Isolation of a new type of N-alkylporphyrin. J. Am. Chem. Soc. 109, 3782-3783. [Pg.306]

Phenethanolamines can be efficiently synthesized by the reaction of N-trimethylsilylated primary amines with styrene oxides isolation is straightforward, and the formation of dialkylated products is avoided. [Pg.295]

Ferrocene was incorporated into the templating micelles of synthetic siliceous MCM-41, and found to affect the morphology and structure of MCM-41. Ferrocene was oxidized to tetrahedrally coordinated oxide isolatedly grafted on the pore wall after calcination at 600°C in oxygen, and transformed to oxide nanoparticles in MCM-41 by further heating at 800°C under vacuum, characterized by TEM, in-situ XAS and EPR measurements. [Pg.251]

Ethylene and propylene copol3miers are able to isolate aldehydes and carbon oxide on heating to T = 240° C. Decomposition with the formation of aldehydes and acids already starts at 150°C, while carbon oxide isolates at 180-200°C. [Pg.361]

Figure 2 Phylogenetic neighbor-joining tree showing the phylogenetic relationship of arsenite oxidizing isolates BEN-5, NT-2, NT-3, NT-4, NT-25, and NT-26 with species belonging to the a-Proteobacteria. The sequence of Mesorhizobium loti was used as the outgroup. Significant bootstrap values from 100 analyses are shown at the branch points of the trees. Bar = 0.01% sequence difference. Figure 2 Phylogenetic neighbor-joining tree showing the phylogenetic relationship of arsenite oxidizing isolates BEN-5, NT-2, NT-3, NT-4, NT-25, and NT-26 with species belonging to the a-Proteobacteria. The sequence of Mesorhizobium loti was used as the outgroup. Significant bootstrap values from 100 analyses are shown at the branch points of the trees. Bar = 0.01% sequence difference.
The oxide isolation methodology has found wide acceptance in the process industry as the preferred device isolation scheme, despite some major shortcomings. For one, it has evolved as a still more complicated process, requiring several additional processes (see Table 1). The oxide isolation region is characterized by two unique features - the so-called "bird s beak" and the "bird s head" (18,19). The beak tends to prevent fully butted junction formation of the base and emitter. Thus, the full benefits of device density cannot be realized. More importantly, the bird s beak generation represents a real limitation to achieve much smaller (narrower) device isolation regions, and therefore, ultimate device densities. [Pg.244]

The oxide isolation has one additional key limitation. The overall thickness of the oxide is practically limited to about 1.0 pm. Greater thicknesses would require an inordinate amount of process time (somewhat offset with the use of high pressure oxidation methods). Furthermore, further thicknesses would also require additional lateral areas consumed during the oxidation process. Thus, in the final analysis, this process technology does not completely have the desireable features for the full extendibility required for VLSI applications. [Pg.246]

As stressed by several authors, the most reliable and sensitivie criteria to determine the nature of a given species are generally their catalytic properties. Specific catalytic features ar,e attached to oxides, isolated cations and isomorphously substituted elements which pertain to those of doping elements. [Pg.299]

The data presented here demonstrate a reliable methodology for monitoring the formation and quantifying the presence of oxidized products of cholesterol. This approach can now be applied towards the analysis of these materials in any type of medium. The synthesis of nona-labeled cholesterol and its use as an internal monitor permit reliable analysis by capillary GC as well as GC-MS. For the analysis of oxides isolated from complex matrices, GC-MS is the desirable analytical method because of its high selectivity. However, the demonstrated applicability of conventional capillary GC provides an inexpensive and more readily available alternative which can be used as an initial screening method. These results provide a basis for new analytical procedures which can be applied to the analysis of sterols of universally recognized medical significance. [Pg.289]

All the stmctures of the superconducting copper oxides isolated up to now are based on these principles. [Pg.231]


See other pages where Isolation oxide is mentioned: [Pg.198]    [Pg.95]    [Pg.246]    [Pg.266]    [Pg.354]    [Pg.355]    [Pg.347]    [Pg.111]    [Pg.256]    [Pg.191]    [Pg.362]    [Pg.158]    [Pg.266]    [Pg.105]    [Pg.28]    [Pg.231]    [Pg.199]    [Pg.301]    [Pg.348]    [Pg.8]    [Pg.231]    [Pg.244]   
See also in sourсe #XX -- [ Pg.244 ]




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