Microwave plasma chemical vapor deposition

W. Qiu, Y.K. Vohra and S.T. Weir, Role of nitrogen in the homoepitaxial growth on diamond anvils by microwave plasma chemical vapor deposition, J. Mater. Res., 22, 1112-1117 (2007). [Pg.243]

Nagano, T. and Shibata, N. (1993), Diamond synthesis by microwave-plasma chemical vapor deposition using CH3CI and CH2C12 as carbon source. Part 1 Regular papers and short notes and review papers Jpn. J. Appl. Phys., 32(11A) 5067-5071. [Pg.93]

Sharda, T., Soga, T., Jimbo, T. and Umeno, M. (2001), Growth of nanocrystaUine diamond films by biased enhanced microwave plasma chemical vapor deposition. Diam. Relat. Mater., 10(9-10) 1592-1596. [Pg.95]

J. Wei, H. Kawarada, J. Suzuki, J. S. Ma, and A. Hiraki, Effects of plasma potential on diamond deposition at low pressure using magneto-microwave plasma chemical vapor deposition, Jpn. J. Appl Phys., 30(6) 1279—1280 (1991)... [Pg.165]

K. Hirabayashi, and S. Matsumoto, Flattened diamond crystals synthesized by microwave plasma chemical vapor deposition in a CO-H2 system, J. Appl. Phys., 75(2) 1151-1154 (1994)... [Pg.167]

M. Komori, T. Maid, T. Kim, G. Hou, Y. Sakaguchi, K. Sakuta, and T. Kobayashi, Homoepitaxial growth of diamond thin films by electron cyclotron-resonance microwave plasma chemical-vapor-deposition apparatus with CO/H gaseous source, Appl. Phys. Lett., 62(6) 582-584 (1993)... [Pg.168]

C. Chen, and T. Hong, The role of hydrogen in diamond synthesis from carbon dioxide-hydrocarbon gases by microwave plasma chemical vapor deposition, Sutf. Coat Technol, 54-55(l-3) 368-373 (1992)... [Pg.168]

S. A. Stuart, and S. Prawer, TEM and CBED observation of defects in isolated diamond crystals synthesized by microwave plasma chemical vapor deposition on tungsten wire tips, J. Computer-Assisted Microscopy, 4(2) 201-204 (1992)... [Pg.172]

W. P. Chai, Y. S. Gu, M. Li, Z. H. Mai, Q. Z. Li, L. Yuan, and S. J. Pang, Orientation influence of cubic boron nitride crystal facets on the epitaxial growth of diamond film by microwave plasma chemical vapor deposition, J. Cryst. Growth, 135(3-... [Pg.173]

B. R. Stoner, and J. T. Glass, Textured diamond growth on (100) B-SiC via microwave plasma chemical vapor deposition, Appl. Phys. Lett, 60(6) 698-700... [Pg.177]

F. G. Celii, D. White, Jr., and A. J. Puides, Deposition of smooth, oriented diamond films using microwave plasma chemical vapor deposition. Thin Solid Films, 212(1-... [Pg.177]

K. Lee, and S. Harris, Boron carbide films grown from microwave plasma chemical vapor deposition. Diamond Relat. Mater, 7[10], 1539-1543(1998). [Pg.386]

M. Chen, C.M. Chen, and C.F. Chen, Preparation of high yield multi-walled carbon nanotubes by microwave plasma chemical vapor deposition at low temperature, J. Mat. ScL, 37, 3561-3567 (2002). [Pg.253]

Isothermal Microwave Plasma Chemical Vapor Deposition... [Pg.397]

Bower C, Zhou O, Zhu W, Werder DJ, Jin S. Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition. Appl Phys Lett 2000 77 2767-9. [Pg.176]

M. L. Marcinek, J. W. Wilcox, M. M. Doeff, R. M. Kostecki, Microwave Plasma Chemical Vapor Deposition of Carbon Coatings on LiNil/3Col/3Mnl/302 for Li-lon Battery Composite Cathodes, J. Electrochem. Soc. 2009, 156, A48-A5E... [Pg.316]

Fig. 4 Typical layout of a microwave plasma chemical vapor deposition system.

Khan MA, Haque MS, Nasseem HA, Brown WD, Malshe AP (1998) Microwave plasma chemical vapor deposition of diamond films with low residual stress on large area porous siUcon substrates. Thin Solid Films 332 93-97... [Pg.237]

Y. Tzeng, C. Liu, A. Hirata, Effects of oxygen and hydrogen on electron field emission Irom microwave plasma chemically vapor deposited microcrystalline diamond, nanocrystalline diamond, and glassy carbon coatings. Diam. Relat. Mat. 12(3-7), 456-463 (2003)... [Pg.343]

Wolf H, Pajkic Z, Gerdes T, WUlert-Porada M (2009) Carbon-fiber-silicon-nanocomposites for lithium-ion battery anodes by microwave plasma chemical vapor deposition. J Power Sources 190(1) 157-161. doi 10.1016/j.jpowsour.2008.07.035... [Pg.522]

Lee, J.-H., Lee, S.H., Kim, D., Park,Y.S., 2013a. The structural and surface properties of carbon nanotube synthesized by microwave plasma chemical vapor deposition method for superhydrophobic coating.Thin Solid Films 546, 94. [Pg.46]

M.L. Marcinek, J.W. Wilcox, M.M. Doeff and R.M. Kostecki, Microwave plasma chemical vapor deposition of carbon coatings on LiNii/3Coi/3Mni/302 for Li-ion battery composite cathodes, /. Electrochem. Soc. 156, 2009, A48-A51. [Pg.217]

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