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Microfluidic structures fabrication

Microfluidic devices, 26 959 effect of scale on, 26 960t fabrication of, 26 963-966 Microfluidics, 26 959-980 applications of, 26 966-975 basic features of, 26 959-966 future directions for, 26 976-977 history of, 26 959 industrial impact of, 26 976 Microfluidic structures fabrication of, 26 963-966 MicroFluidic Systems, 26 976 Micro-gas chromatography (micro-GC), 6 434 37 Microgel particles... [Pg.585]

Interestingly, most research efforts with polymer microfluidic structures have focused on applying the same planar two-dimensional layouts of glass microchips in plastic devices. However, multilayer microstructures, wherein multiple channels can cross over one another without contamination, would significantly increase the operational flexibility in miniaturized analysis. Multilayer microfluidics have been fabricated in glass, and PDMS/glass hybrid microchips.However,... [Pg.1433]

The fabrication of 3D microfluidic structures is related to the microfahrication or micro-electromechanical systems (MEMS) processes, which produce the microscale structures (or microchannels) involving or relating to three dimensions (x, y, and z) or aspects and giving the illusion of depth, for the handling of fluids in biomedical, chemical, biological devices, etc. It is specifically referred to in the fabrication of... [Pg.1069]

Fabrication of 3D Microfluidic Structures, Table 1 Silicon etch rate at different crystal orientations inKOH... [Pg.1072]

Fabrication of 3D Microfluidic Structures, Fig. 2 Three main planes in a cubic lattice... [Pg.1072]

Besides the continuous and the TMDE process, single feeding gas (such as SFe) has been utilized in fabrication of 3D microfluidic structures with isotropic features for special applications. At the present time, commercial ICP etchers are available from Alcatel, San Jose, CA Surface Technology Systems, Ltd. (STS), Redwood City, CA and Plasma-Therm, Inc., St. Petersburg, FL. [Pg.1075]

Fabrication of 3D Microfluidic Structures, Fig. 10 Direct casting process (a) making a 3D mold (b) casting a polymer structure (c) peeling off the 3D polymer structure (d) bonding to form sealed microfluidic structure... [Pg.1078]

Fabrication of 3D Microfluidic Structures Integrated Microdevices for Medical Diagnostics... [Pg.1870]

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