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Fabrication of 3D Microfluidic Structures

The fabrication of 3D microfluidic structures is related to the microfahrication or micro-electromechanical systems (MEMS) processes, which produce the microscale structures (or microchannels) involving or relating to three dimensions (x, y, and z) or aspects and giving the illusion of depth, for the handling of fluids in biomedical, chemical, biological devices, etc. It is specifically referred to in the fabrication of... [Pg.1069]

Fabrication of 3D Microfluidic Structures, Table 1 Silicon etch rate at different crystal orientations inKOH... [Pg.1072]

Fabrication of 3D Microfluidic Structures, Fig. 2 Three main planes in a cubic lattice... [Pg.1072]

Besides the continuous and the TMDE process, single feeding gas (such as SFe) has been utilized in fabrication of 3D microfluidic structures with isotropic features for special applications. At the present time, commercial ICP etchers are available from Alcatel, San Jose, CA Surface Technology Systems, Ltd. (STS), Redwood City, CA and Plasma-Therm, Inc., St. Petersburg, FL. [Pg.1075]

Fabrication of 3D Microfluidic Structures, Fig. 10 Direct casting process (a) making a 3D mold (b) casting a polymer structure (c) peeling off the 3D polymer structure (d) bonding to form sealed microfluidic structure... [Pg.1078]

Fabrication of 3D Microfluidic Structures Integrated Microdevices for Medical Diagnostics... [Pg.1870]

Fabrication of 3D Microfluidic Structures, Rgure 13 Schematic of fabrication process of 3D polymer microstructures by combination of conventional photolithography and photoresist reflow (a) photoresist patterned on the silicon wafer (b) photoresist mold after thermal treatment (c) PDMS casting on the photoresist mold (d) PDMS with desired stmclures... [Pg.655]

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See also in sourсe #XX -- [ Pg.645 ]



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3D structures

Fabric structure

MicroFluidizer

Microfluid

Microfluidic

Microfluidics

Microfluidics fabrication

Microfluidization

Microfluidizers

Microfluids

Of 3D structures

Structure, fabrication

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