Microfluidic device fabrication methods

The soft lithography method was developed for rapidly and inexpensively fabricating microfluidic devices with channels >20 pm width using... 

The purpose of this chapter has been two-fold. First, to highlight some of the basic methods and substrates that have been successfully utilized to create microfluidic devices. We have attempted to describe these methods, albeit at a rudimentary level, in a manner that allows for someone skilled in CE to fabricate, functionalize and execute microchip-based electrophoresis. In addition to the basic... 

The substrate for the microfluidic device should be selected with consideration of the end application. Substrates used to fabricate the microchip device should not interact with target analytes, and must be compatible with the detection method employed (i.e., should not exhibit background fluorescence, BGF.). For the analysis of nonpolar compounds, it should be kept in mind that substrates such as poly(dimethyl)siloxane (PDMS) can adsorb hydrophobic analytes such as peptides and proteins. Plasma oxidation or treatment of the surface can sometimes be useful to minimize these interactions [34,35]. For perfusates containing organic solvents, compatibility with polymer substrates can also be an issue. Substrates to be used for the fabrication of electrophoresis-based separation devices should be capable of supporting a stable electroomostic flow (EOF). The use of a low cost material and standard processing procedures can permit mass fabrication of devices. 

This chapter describes the theory, methodology, and application of a microfabrication process that uses phase-changing sacrificial layers (PCSLs) as intermediates to protect microchannel features during bonding or hydrogel polymerization. We focus on key process details associated with the fabrication of microchips, and the application of PCSL-formed microfluidic devices in CE separations and other electric field-based analysis methods. Finally, we provide a brief overview of potential future trends and applications of PCSL fabrication methods in microfluidics. 

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