Soft-lithography methods

Soft Lithography Method for Fabricating Microfluidic Systems... 

The soft lithography method was developed for rapidly and inexpensively fabricating microfluidic devices with channels >20 pm width using... 

The printing of etch-resistant polymers by soft lithography methods is an attractive option for the fabrication of lithographic masks. Microcontact printing is a versatile technique to generate chemically distinct patterns on solid... 

Emulsification of the aqueous siliceous precursor was achieved by supplying the aqueous (sol-gel solution) phase and the oil phase to the microfluidic device using two syringe pumps. The continuous phase was prepared by dissolving ABIL EM 90 surfactant in hexadecane, which served as the emulsifier. The SU-8 photoresist-templated PDMS microfluidic device was fabricated using a well-established soft lithography method [10], The microfluidic devices used in this study is shown in Figure 19.7. 

To realize micro reactors with sensing and surface-control structures, the underlying fabrication methods have to go beyond MEMS and classical micro machining [75]. Plastic and glass manufacture and also novel innovative methods such as soft lithography have to be developed further and applied. 

A number of fabrication techniques meet the general requirements for constructing an efficient and compact microreactor. Popular methods include LIGA, wet and dry etching processes, micromachining, lamination, and soft lithography. 

A new methodology, which combines traditional (top-down) lithography and self-assembly (bottom-up) approaches, has been developed for fabrication of complex nanoscale colloidal stmctures on a surface over a large domain. The principle of this method is to create a chemically patterned surface by well-established soft lithography, followed by self-assembling nanoparticles selectively deposited... 

Polysiloxanes are apparently the materials of choice in the new soft-lithography techniques.376 380 The method is outlined briefly in Figure 4.20. In the first step, linear (liquid) PDMS is poured over the surface of the master to be reproduced. It is then cross linked, and peeled away from the master surface. The PDMS surface containing the pattern is then coated with a hydrophobic alkane thiol, and the pattern transferred to a... 

Soft lithography is an emerging method for micro- and nanofabrication of two- or three-dimensional structures on surfaces.73 78 This method developed by Whitesides and coworkers uses elastomeric stamps, molds, and conformable photomasks for creating patterns as small as tens of nanometers on substrates. Depending on the... 

---