Micro/Nano Anemometers

Hot-wire anemometers ( Micro/Nano-Anemometers ) have been developed for a wide spectrum of applications from experimental fluid mechanics to aerospace engineering to measure physical parameters such as temperature, flow rate, and shear stress. The advent of microelec-tromechanical systems (MEMS) and nanoscale thermal sensors has provided an entry point to microfluidics, biomedical sciences, and microcirculation in cardiovascular medicine. These MEMS and nanoscale devices are fabricated... 

Hot-wire anemometers have traditionally been applied in the fields of experimental fluid mechanics and aerospace engineering. Despite the possibilities to measure real-time physical parameters such as temperature, velocity, flow rates, and shear stress, the spatial resolution is limited to the device dimension. The advent of MicroElectroMe-chanical system (MEMS) and nano-scale thermal sensors has revolutionized the spatial and temporal resolution critical to gain entry into micro-fluidics, micro-circulation, biomedical sciences, and cardiovascular medicine. These micro/nano devices are fabricated with the Semiconductor-... 

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