Metallorganic chemical vapor deposition MOCVD

Vapor deposition methods include physical vapor deposition (PVD) (Heremans et al., 2000) and chemical vapor deposition (CVD) (Cheng et al., 2000) or metallorganic chemical vapor deposition (MOCVD) (Berry et al., 1996). Vapor deposition and electrochemical deposition are capable of... 

Organometallic (Metallorganic) Chemical Vapor Deposition (MOCVD)... 

Metallorganic chemical vapor deposition (MOCVD) is now widely used in the preparation of III-V and II-VI devices. In addition to the hydride gases used as source materials in other CVD systems (e g., arsine and phosphine), less toxic liquid alternatives (e.g., tertiary butyl arsine and tertiary butyl phosphine) are also used in MOCVD systems along with other toxics such as cadmium alkyls and mercuiy.[42][43]... 

A nice example of the kind of reaction that can be achieved has been reported by Fisher and co-workers.163 Their goal was to produce an MOCVD (metallorganic chemical vapor deposition) reagent and they were successful in achieving the reaction shown in Eq. (25). 

Superlattice and low-dimensional physics are some of the most interesting subjects in solid-state physics. A challenging problem in this field is the formation of quantum wire and quantum box structures by using ultra-high technology such as MBE, MOCVD (metallorganic chemical vapor deposition), and related frontier microprocessing. However, this problem has not yet been solved. Poly silane is probably a perfect quantum wire in itself The absorption spectrum of polysilane clearly shows the characteristics of a one-dimensional quantum wire. Even a quantum box or a one-dimensional superlattice can be formed by chemical polymerization, which may be the simplest way. 

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