Metal-Organic Chemical Vapor Condensation

Several techniques have been developed to deposit alumina films on different surfaces such as those of semiconductors or metals. These films find apphcation in various areas. In most cases, amorphous alumina films are desired. Depending on the deposition techniques, various precursors may be used the following combinations have been reported plasma-enhanced atomic layer deposition using trimethylaluminum (112), metal-organic chemical vapor deposition using aluminum tri-iso-propoxide (113), and condensation from the gas phase using laser-evaporated alumina (114). Similar evaporation techniques can also be apphed to prepare Y-AI2O3 powders (115,116). 

Ullrafine particles (UFPs) of metal and semiconductor nitrides have been synthesized by two major techniques one is the reactive gas condensation method, and the other is the chemical vapor condensation method. The former is modified from the so-called gas condensation method (or gas-evaporation method) (13), and a surrounding gas such as N2 or NII2 is used in the evaporation chamber instead of inert gases. Plasma generation has been widely adopted in order to enhance the nitridation in the particle formation process. The latter is based on the decomposition and the subsequent chemical reaction of metal chloride, carbonate, hydride, and organics used as raw materials in an appropriate reactive gas under an energetic environment formed mainly by thermal healing, radiofrequency (RF) plasma, and laser beam. Synthesis techniques are listed for every heal source for the reactive gas condensation method and for the chemical vapor condensation method in Tables 8.1.1 and 8.1.2, respectively. 

High-temperature thermal treatment of hazardous waste offers a reduction in volume as well as a conversion of toxic organic constituents to harmless or less harmful forms [1]. However, hazardous metals can neither be generated nor destroyed in the waste thermal process, but they can be transformed both chemically and physically [2]. There is therefore a potential for hazardous metals to emit if they vaporize at high temperatures [3]. Many matals and their salts will form vapors at temperatures reached by flame and post-flame zones of a combustion chamber. When the vapors cool, they condense to form submicron particles, which tend to be relatively difficult to capture in air polution control equipments. These emissions of submicron metallic particles have been identified as one of the greatest health risks associated with waste incineration [4]. 

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