Metal additives, conductance sensor

The experimental studies of the surface properties of monocrystals of oxides of various metals recently conducted at well-controlled conditions [32, 210] enable one to proceed with detailed analysis of separate effects of various factors on characteristics of semiconductor gas sensors. In this direction numerous interesting results have been obtained regarding the fact of various electrophysical characteristics of monocrystalline adsorbents on the value of adsorption-related response. Among these characteristics there are crystallographic orientation of facets [211], availability of structural defects, the disorder in stoichiometry [32], application of metal additives, etc. These results are very useful while manufacturing sensors for specific gases with required characteristics. 

A cross-sectional schematic of a monolithic gas sensor system featuring a microhotplate is shown in Fig. 2.2. Its fabrication relies on an industrial CMOS-process with subsequent micromachining steps. Diverse thin-film layers, which can be used for electrical insulation and passivation, are available in the CMOS-process. They are denoted dielectric layers and include several silicon-oxide layers such as the thermal field oxide, the contact oxide and the intermetal oxide as well as a silicon-nitride layer that serves as passivation. All these materials exhibit a characteristically low thermal conductivity, so that a membrane, which consists of only the dielectric layers, provides excellent thermal insulation between the bulk-silicon chip and a heated area. The heated area features a resistive heater, a temperature sensor, and the electrodes that contact the deposited sensitive metal oxide. An additional temperature sensor is integrated close to the circuitry on the bulk chip to monitor the overall chip temperature. The membrane is released by etching away the silicon underneath the dielectric layers. Depending on the micromachining procedure, it is possible to leave a silicon island underneath the heated area. Such an island can serve as a heat spreader and also mechanically stabihzes the membrane. The fabrication process will be explained in more detail in Chap 4. 

Consequently, the proposed model allows the necessary information regarding the electrolyte-metal electrode interface and about the character of the electronic conductivity in solid electrolytes to be obtained. To an extent, this is additionally reflected by the broad range of theoretical studies currently published in the scientific media and is inconsistent with some of the research outcomes relative to both physical chemistry of phenomena on the electrolyte-electrode interfaces and their structures. Partially, this is due to relative simplifications of the models, which do not take into account multidimensional effects, convective transport within interfaces, and thermal diffusion owing to the temperature gradients. An opportunity may exist in the further development of a number of the specific mathematical and numerical models of solid electrolyte gas sensors matched to their specific applications however, this must be balanced with the resistance of sensor manufacturers to carry out numerous numbers of tests for verification and validation of these models in addition to the technological improvements. 

In addition to the modified electrodes described in the previous sections, which usually involve a conductive substrate and a single film of modifying material, more complicated structures have been described. Typical examples (Figure 14.2.4) include multiple films of different polymers (e.g., bilayer structures), metal films formed on the polymer layer (sandwich structures), multiple conductive substrates under the polymer film (electrode arrays), intermixed films of ionic and electronic conductor (biconductive layers), and polymer layers with porous metal or minigrid supports (solid polymer electrolyte or ion-gate structures) (6,7). These often show different electrochemical properties than the simpler modified electrodes and may be useful in applications such as switches, amplifiers, and sensors. 

Recently, organic conducting polymers have become the focus of much of the materials research in chemosensing devices. Synthetic flexibility allows the chemical and physical properties of polymers to be tailored over a broad range of values for any given application. In addition, polymers exhibit tunable specificity to volatile organic compounds, which makes them ideal candidates for replacing canonical sensor materials such as metal oxide semiconductors. 

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