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Material removal rate comparison

During an ECP-DI process, the electrical conductivity of the water coming in contact with the ion exchanger is increased because the protruded areas of the wafer will come in contact with the ion exchanger more often and will have high removal rate. In comparison, the recessed areas are farther away from the ion-exchange material. They will experience lower material removal rate. The planarization is thus accomplished. [Pg.337]

Chapter 3 deals with in depth discussion on basic mechanism of material removal for EMM. Moreover, equivalent electrical circuit, material removal rate (MRR) model, formulation of MRR based on equivalent electrical circuit model as well as comparison of basic model and electrical circuit model of... [Pg.277]

Figure 8. Comparison of the material removal rate of sol/gel derived sintered and of fused grits on the basis of AI2O3 (flexible fiber disc, 6000min, contact pressure 30N workpiece steel tube [ST W 22 DIN 1543] with diameter 195 mm, wall thickness 1 mm). Figure 8. Comparison of the material removal rate of sol/gel derived sintered and of fused grits on the basis of AI2O3 (flexible fiber disc, 6000min, contact pressure 30N workpiece steel tube [ST W 22 DIN 1543] with diameter 195 mm, wall thickness 1 mm).
The direct benchmark of cemented carbide tools and monolithic ceramic milling cutters has shown a material removal rate eight times higher. Figure 5 shows the process parameters used for the comparison of both... [Pg.332]

The erosion rate, E, is conunonly given in terms of mass or volume of material removed per unit mass of erodent impacted, volume being preferred because it permits thickness loss comparisons between materials of different density. Implicit is the assumption that the dimensions of the eroded area and the particle concentration are unimportant, which is a good approximation for dilute flows. Metals and ceramics differ in the dependence of E on a, as mentioned above, and also in their response to velocity and particle size and shape. E generally shows a power-law velocity dependence ... [Pg.64]

Nuclear and magneto-hydrodynamic electric power generation systems have been produced on a scale which could lead to industrial production, but to-date technical problems, mainly connected with corrosion of the containing materials, has hampered full-scale development. In the case of nuclear power, the proposed fast reactor, which uses fast neutron fission in a small nuclear fuel element, by comparison with fuel rods in thermal neutron reactors, requires a more rapid heat removal than is possible by water cooling, and a liquid sodium-potassium alloy has been used in the development of a near-industrial generator. The fuel container is a vanadium sheath with a niobium outer cladding, since this has a low fast neutron capture cross-section and a low rate of corrosion by the liquid metal coolant. The liquid metal coolant is transported from the fuel to the turbine generating the electric power in stainless steel... [Pg.300]


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