Laser Ablation Resists Dry Etching

During the last decade laser processing of polymers has become an important field of applied and fundamental research. One of the most promising 

The etch rates at a given fluence are obtained from the slope of linear plots of the etch depth vs the number of pulses delivered at a given fluence. For all polymers linear relations were obtained. A comparison of the etch rates/pulse at low fluences for the different polymers is shown in Fig. 79. 

UV-Vis spectra were recorded before and after immersion. The TC films decomposed totally, while the CM polymer films revealed nearly no changes in the spectra. This shows that the CM polymers are stable under wet acid conditions, and therefore pass the stability criterion. 

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