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Ion beam spectrochemical analysis

Elastic Recoil Detection Analysis Glow discharge mass spectrometry Glow discharge optical emission spectroscopy Ion (excited) Auger electron spectroscopy Ion beam spectrochemical analysis... [Pg.4]

Ion beam spectrochemical analysis (IBSCA) is a sputtering-based surface analytical technique similar to SIMS/SNMS. In IBSCA the radiation emitted by excited sputtered secondary neutrals or ions is detected. IBSCA was developed parallel to SIMS in the nineteen-sixties and early nineteen-seventies [4.246, 4.247]. It is also known... [Pg.240]

Ion beam spectrochemical analysis Auger emission spectroscopy Scanning electron microscopy (SEM) Electron microprobe (EMPA) Particle-induced X-ray emission spectroscopy (PIXE)... [Pg.154]

IBSGA Ion Beam Spectrochemical Analysis, 17 IE AES Ion Excited Auger Electron Spectroscopy lETS Inelastic Electron Tunneling Spectroscopy, 19 INS Inelastic Neutron Scattering ... [Pg.595]

Ion Beam Spectrochemical Analysis. As remarked earlier, ion irradiation of a surface produces visible light photons as well as many other types of particle. The light emission arises from the deexcitation of ions and excited neutrals, and is characterized by a spectrum consisting of a series of sharp lines at wavelengths associated with the type of ionized or excited atom. Spectral analysis thus provides elemental identification by reference to standard emission wavelength tables. [Pg.920]

See other pages where Ion beam spectrochemical analysis is mentioned: [Pg.240]    [Pg.243]    [Pg.348]    [Pg.129]    [Pg.533]    [Pg.920]    [Pg.1018]    [Pg.240]    [Pg.243]    [Pg.348]    [Pg.129]    [Pg.533]    [Pg.920]    [Pg.1018]    [Pg.52]    [Pg.52]    [Pg.371]   
See also in sourсe #XX -- [ Pg.918 ]



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