Final polishing point

In the CMP planarization process, detecting the final polishing point is extremely important for maintaining high yield rates. Therefore, various methods for detecting the final polishing point have been developed. 

Depth filters are usually preferred for the most common type of microfiltration system, illustrated schematically in Figure 28. In this process design, called "dead-end" or "in-line" filtration, the entire fluid flow is forced through the membrane under pressure. As particulates accumulate on the membrane surface or in its interior, the pressure required to maintain the required flow increases until, at some point, the membrane must be replaced. The useful life of the membrane is proportional to the particulate loading of the feed solution. In-line microfiltration of solutions as a final polishing step prior to use is a typical apphcation (66,67). 

To reach a large wear rate, a coarse grain size and large tools are used. The last point is of essential importance to avoid ripple structures because they become visible in only the final polishing phase. The tool size and stroke amplitude define the final surface smoothness with respect to short-wave errors. 

Polishing. This last process step prepares the product for final formulation or for actual sale. It is designed to remove any aggregated protein, remove residual chromatographic eluent(s), and place the product into a specific solvent. These requirements are admirably served by gel filtration. At this point, the sample volume is small and the product fraction to be applied is fairly clean. The gel and column equipment requirements are now within reason and, the clean samples result in much longer gel life. 

The primary market for the disposable cartridge is sterile filtration for the pharmaceutical industry and final point-of-use polishing of ultrapure water for the microelectronics industry. Both industries require very high-quality, particle-free water. The cost of microfiltration compared to the value of the products is small so these markets have driven the microfiltration industry for the past 15 years. 

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