Filtered arc

Variation of the internal stress and measured hardness for a variety of multilayer films compared with monolithic films. The multilayer films are shown with filled symbols and the monolithic films with unfilled ones. The TiN was made by either ion assisted arc deposition (IAAD) or filtered arc deposition (FAD). Note that hardnesses in the monolithic materials of up to 50 GPa appear to be achievable simply by internal stresses. 

Process techniques such as filtered arc [124-126] deposition, or pulsed laser deposition [79,127-130] generate outstanding film properties for a variety of TCO materials. The main feature is that the film formation is achieved with ions instead of using mostly neutral atoms. The state of the art is the pulsed laser deposition of ZnO Al films, where resistivity of 85 pQ cm has been reported at a substrate temperature of 230°C [79]. This result can be attributed to the high doping efficiency because of the suppression of AI2O3 formation when ionized species are used for film formation. 

For filtration, Hahn suction filters arc convenient (Fig. 12.6). They allow easy removal of the filter for further operations or subsequent measurements. 

Another function of the mechanical ventilation system is to clean the air by filtering it as it enters the building. Various types of filters arc available for this purpose, depending on the cicanline.s.s requirements and the allowable pressure drop. 

Raman spectroscopy was used to characterise the microstructure of ta C films deposited by filtered arc, accelerated at different energies.310 Similar data were used to examine a C films incorporating Si, Ge and N 311 and ta C films (showing an amorphous sp3 skeleton containing sp2 clusters (sizes < 1 nm.).312 Raman spectra were used to follow the nanostructuring of ta C films induced by ion-beam C implantation.313... 

Two types of filters are used for wavelength selection imerfcrence fihvrs, which are sometimes called l-abry-I cnn fillers, and absorption fillers. Absorption filters arc restricted to the visible region of the spectrum, interference filters, on Ihe other hand, arc available for the ultraviolet, visible, and well into Ihe infrared region. 

Zhang, F., Wang, W., Li, C., Wang, H., Chen, L., and Liu, X., Rutile type titanium oxide films synthesized by filtered arc deposition. Surf. Coat. Tech., 110, 136-139, 1998. 

Holographic optical devices and. in particular, holographic filters - arc among a growing repertoire of optical devices and materials that have resulted from the... 

Figure 1 (A) Afibre optic spectroscopy system with separate illumination and collection path is based on an excitation source, which is a laser or a white light source (reflectometry) or a monochromator filtered arc lamp (fluorescence). Optics couple the excitation light into the flexible probe. A probe collects the emitted light. Coupling optics adapt the numerical aperture of the probe to the spectrograph or filter system. An optical detector (charge coupled device (CCD), photodiode array, photomultiplier tube) is read out and digitized. (B) A fibre optic spectroscopy system with a probe that incorporates one optical fibre needs a dichroic beam splitter and well aligned optics to separate excitation and fluorescence light. Reproduced with permission of Optical Society of America Inc. from Greek LS, Schulze HG, Blades MW, Haynes CA, Klein K-F and Turner RFB (1998) Fiber-optic probes with improved excitation and collection efficiency for deep-UV Raman and resonance Raman spectroscopy. Applied Optics Z7 ).

The use of arc vapor deposition as a pretreatment includes using filtered arc deposition followed by magnetron sputtering to form adherent CrN coatings on steel.t - ... 

Filtered arc source An arc vaporization source designed to filter out the macros, generally by deflecting the plasma beam. See also Arc source Plasma duct. 

Macros (arc vaporization) Molten globules of electrode material ejected under arcing conditions from a solid cathode and deposited onto the substrate, giving nodules in the film. See also Filtered arc source Plasma duct. 

Plasma duct (arc vaporization) A filtered arc source where the plasma is magnetically deflected so that the macros are deposited on the wall of the duct. See also Arc source. 

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