Fabrication technology nanofluidics

With the rapid development of micro- and nanochannel fabrication technologies and the increasing need for simple, portable, yet sensitive particle counting and sizing device, there is a resurgence in the field of RPS, and many researchers tried RPS particle detection in a microfluidic or nanofluidic chip. 

A review of the literature showed that the nanoparticles used in the production of nanofluids were aluminum oxide (AI2O3), titanium dioxide (Ti02), nitride ceramics (AIN, SiN), carbide ceramics (SiC, TiC), copper (Cu), copper oxide (CuO), gold (Au), silver (Ag), silica (Si02) nanoparticles and carbon nanotubes (CNT). The base fluids used were water, oil, acetone, decene and ethylene glycol. Modem technology allows the fabrication of materials at the nanometer scale, they are usually available in the market under different particle sizes and purity conditions. They exhibit... 

Microfluidic and nanofluidic chips have a wide range of applications in the chemical, biomedical, environmental, and biology areas, where a variety of chemical solutions are used. With the development of microfabrication technology, many new materials such as PDMS and poly (methyl methacrylate) (PMMA) are also employed for chip fabrication. Since each pair of sohd-liquid interface has its unique zeta potential and electroosmotic mobility, which have significant influences on flow control in such small-scale devices, it is very important to experimentally determine these two parameters using the current monitoring technique in order to develop microfluidic and nanofluidic devices for various applications. 

Further, given the need to fabricate thin-film devices with features measured in nanometers in conjunction with micro- and nanofluidics, an understanding of the nature of polarization and ferroelectric domain growth in materials compatible with fabrication at these scales is vital. The applications for this technology span many disciplines nonvolatile memory for computer technology, sensors for medical and biological diagnostics, and actuators and microwave devices for consumer applications [14]. 

Within the specific context of micro- and nanofluidics, the fabrication of self-assembled nanostrucures can represent an enabling technology for novel engineering applications. One such application - and the specific motivation for this article - lies in the creation of catalytic nanostructures for micro-Znanoscale reacting flow systems. A specific example is the catalyzed chemical decomposition of monopropellant fuels for the purposes of small satellite micropropulsion [1] (Fig. 2). Here, the size and density of nanorod formations naturally provide the high surface area-to-volume ratios desirable for efficient catalysis in microscale geometries. Certainly other important appli-... 

Silicon micromachining technology is important in the fabrication of micro- and nanofluidic chips, MEMS/NEMS and other miniaturized devices [10], Deep reactive ion etching opens new research opportunities... 

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