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Electrodes photoresist micro

Wang, S., B. Hsia, C. Carraro, and R. Maboudian. 2014. High-performance all solid-state micro-supercapacitor based on patterned photoresist-derived porous carbon electrodes and an ionogel electrolyte. Journal of Materials Chemistry A 2 7997-8002. [Pg.248]

Photolithography is the most diffused technique for the fabrication of regular arrays of microelectrodes. Photolithography is a microfabrication technique which is based on the selective removal of parts of thin films (photoresist) exposed to UV light. This procedure allows one to obtain regular arrays of micro electrodes with high spatial resolution, nonetheless this technique requires special and expensive equipments besides, the photolithographic process requires access to a clean room. [Pg.588]

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