EDX/EELS

EDXS EELS EM ENVI Energy-dispersive X-ray Spectroscopy Electron Energy Loss Spectroscopy Electron Microscopy Environment for Visualizing Images... 

STEM Scanning transmission microscopy Electron Electron (transmission) Polarization = 1 nm Crystallization in very fine regions (+ EDX, + EELS)... 

The characterization of materials using TEM can give information about their structure and morphology. Allied techniques from TEM, such as EDX, EELS, EFTEM, and electron diffraction (ED), can complement the information obtained for a specific material. Several reviews and compilations of the studies on TEM and related techniques... 

Figure 2.9 SEM, STEM, and EDX/EELS images of Co divots created by localized corrosion of Co during CMP and post-CMP cleaning.

AF correction, in EDXS 205 Zero-loss peak, in EELS 57... 

E-ct-phenylcinnamic acid, 6 edges, 281 EDX, 168 EDX analyses, 315 EELS, 223 eggshell, 277 eggshell repartition, 257 electrical conductivity, 8 electro-optical properties and quantum confinement,... 

Local composition is very useful supplementary information that can be obtained in many of the transmission electron microscopes (TEM). The two main methods to measure local composition are electron energy loss spectrometry (EELS), which is a topic of a separate paper in this volume (Mayer 2004) and x-ray emission spectrometry, which is named EDS or EDX after the energy dispersive spectrometer, because this type of x-ray detection became ubiquitous in the TEM. Present paper introduces this latter method, which measures the X-rays produced by the fast electrons of the TEM, bombarding the sample, to determine the local composition. As an independent topic, information content and usage of the popular X-ray powder dififaction database is also introduced here. Combination of information from these two sources results in an efficient phase identification. Identification of known phases is contrasted to solving unknown stmctures, the latter being the topic of the largest fiaction of this school. 

Figure 1. K-shell fluorescence yields as a function of the atomic number. Light element region is magnified. It can be seen that only a few photons are emitted out of one thousand ionizations in case of the lightest elements. As a consequence, analysis of light elements with EDX is less efficient than with EELS or AES.

The Ga Sb atomic ratio within each whisker equals almost 1 as was proven by EDX and EEL spectroscopy. The Sb distribution within the crystalhne needle is homogeneous whereas the (amorphous) tip contains Ga with an Sb concentration of about 1%. Carbon could not be detected by EELS within the GaSb whiskers, whereas O is present as a small surface layer due to surface ox-... 

Co mposition/pur ity elemental identification AES, XPS, SIMS, ISS, RBS, EELS (Core level), APFIM, NRA, PIXE, GDMS, GDOS, SCANHR, EDX, laser microprobe, and electron microprobe... 

Current methods used to image MCM-41 include (1) analytical transmission electron microscopy (TEM) to determine structure, size, morphology, and local chemical composition (2) energy-dispersive X-ray spectroscopy (EDXS) in a scanning electron microscope (SEM) to determine chemical composition 5 and (3) electron energy loss spectroscopy (EELS) for elemental analysis.6... 

H. Bucking, S. Beckmann, W. Heyser and I. Kottke (1998). Elemental contents in vacuoler granules of ectomycorrhizal fungi measured by EELS AND EDXS - a comparison of different methods and preparation techniques. Micron, 29, 53-61. 

In addition to its power of directly imaging atomic structures of crystals, H RTEM is often equipped with several other powerful devices for characterization of solids, such as electron diffraction (ED), EDX, electron energy loss spectroscopy (EELS), scanning transmission electron microscopy (STEM) and so on. In this chapter, only the most commonly used supporting techniques for HRTEM, ED and EDX, are discussed in detail. 

A paper on new developments in the characterisation of polymers in the solid state must include a discussion of the possibilities offered by scanning electron transmission and the ancillary detection devices EDX (energy dispersive analysis of X-rays) and EELS (electron energy loss spectroscopy). 

---