Electron energy-loss spectrometry

R. F. Egerton. Electron Energy Loss Spectrometry in the Electron Microscope. Plenum Press, 1986. This is a comprehensive text on the use of EELS in the TEM. It covers instrumentation, theory and practical applications. 

P. Rez in M. M. Disko, C. C. Ahn, B. Fultz (eds.) Transmission Electron Energy Loss Spectrometry in Materials Science, The Minerals, Metals and Materials Society, War-rendale 1992, p. 107. 

Transmission Electron Energy Loss Spectrometry in Materials Science,... 

PEELS parallel electron energy-loss spectrometry... 

Local composition is very useful supplementary information that can be obtained in many of the transmission electron microscopes (TEM). The two main methods to measure local composition are electron energy loss spectrometry (EELS), which is a topic of a separate paper in this volume (Mayer 2004) and x-ray emission spectrometry, which is named EDS or EDX after the energy dispersive spectrometer, because this type of x-ray detection became ubiquitous in the TEM. Present paper introduces this latter method, which measures the X-rays produced by the fast electrons of the TEM, bombarding the sample, to determine the local composition. As an independent topic, information content and usage of the popular X-ray powder dififaction database is also introduced here. Combination of information from these two sources results in an efficient phase identification. Identification of known phases is contrasted to solving unknown stmctures, the latter being the topic of the largest fiaction of this school. 

The blue shift of the position of the conductance band measured by electron energy loss spectrometry [38] and of the PL [39] with decreasing crystallite size is clearly seen. In contrast, no such shift is found in bulk nc-Si/Si02 films (Fig. 4) [19]. 

The need for both qualitative and quantitative analyses of light elements in the transmission electron microscope has stimulated the development of electron energy loss spectrometry (EELS). In this technique. 

Once the breakdown location is identified using DBIE, electron energy loss spectrometry (EELS) was performed using a FEI-TITAN 300 kV TEM/STEM to analyze the chemical nature of the percolation path [10,11]. Fig. 2 illustrates a close-up view of the sample configuration and beam-sample interaction. STEM/EELS spectra were collected at 80 keV beam voltage using point-to-point vertical and horizontal scans as shown in Fig. 2b across the dielectric layer at the breakdown site identified by a DBIE and at the non-breakdown site that were far away from the DBIE. 

Microprobe techniques, and their detection limits (given in mgkg ), that have been applied to Al localization include energy dispersive (electron probe) X-ray microanalysis (20), wavelength-dispersive X-ray microanalysis, electron energy loss spectrometry (500), proton probe nuclear microscopy (10), resonance ionization mass spectrometry (3), secondary ion mass spectrometry (1), laser microprobe mass spectrometry (1) and micropartide-induced X-ray emission (Yokel 2000). 

R.F. Willis, W. Ho, and E.W. Plummer. Vibrational Excitation of Hydrogenic Modes on Tungsten by Angle Dependent Electron Energy Loss Spectrometry. Surf. Sci. 80 593 (1979). 

This article will focus on the use of electron energy loss spectrometry (EELS) in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM). In a TEM or STEM, a beam of electrons is accelerated to energies typically between 100 keV and IMeV. The beam of electrons is transmitted through a sample that consists of a thin piece of material (typically less than 50 nm thickness). Interaction of the beam with the sample enables the operator to learn something about the sample, such as the chemical elements present, stoichiometry, energy levels, electronic structure, and more. 

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