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ED polymers

The ED polymers described in section 2.3 are not effective on their own as resists for primary imaging, etch-resists or any other application. The addition of other components to the resist is necessary for the formulation of workable products. Some typical resist additives for both negative- and positive-working photoresists are described in the following sections. Most of these additives are also incorporated into ED resists for other applications. [Pg.61]

Polymers for ED resists have been covered extensively in section 2.3. The polymer contains ionizable groups for both electrodeposition [Pg.61]


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See other pages where ED polymers is mentioned: [Pg.422]    [Pg.502]    [Pg.568]    [Pg.137]    [Pg.137]    [Pg.137]    [Pg.147]    [Pg.199]    [Pg.209]    [Pg.334]    [Pg.356]    [Pg.233]    [Pg.29]    [Pg.135]    [Pg.241]    [Pg.243]    [Pg.262]    [Pg.373]    [Pg.428]    [Pg.438]    [Pg.204]    [Pg.204]    [Pg.204]    [Pg.207]    [Pg.262]    [Pg.67]    [Pg.231]    [Pg.550]    [Pg.444]    [Pg.456]    [Pg.472]    [Pg.511]    [Pg.511]    [Pg.234]    [Pg.353]    [Pg.468]    [Pg.236]    [Pg.478]   


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