Digital micromirror

These drawbacks may be overcome in the near future, if the promise of bench-top synthesizers that allow the in situ synthesis of OND arrays is realized [70]. These devices make use of a more flexible technology that replaces the chrome masks with virtual masks generated on a computer, which are relayed to a digital micromirror array, hi this way OND arrays containing more than 76 000 features measuring 16 pm have been constructed [70]. 

Figure 2.4 Digital micromirror device (DMD). (From Singh-Gasson, S. et al., Nat. Biotechnol., 17,974-978,1999 and Lee, P. et al, /. Micromechanics Microeng., 13,474—481, 2003. With permission.)...

Case Study III Infrared Digital Micromirror Array... 

Microfabricated devices capable of switching optical light beams, also termed MOEMS, have gained attention about a decade ago for applications like optical fiber switches, microscanners, or digital micromirror arrays. Particularly, the latter devices have found widespread application in video projection systems for office presentations, home cinema, and very recently, the replacement of classical projectors in movie theaters. Other applications, for example, for head-up displays on auto windscreens are in development. In all cases, arrays of small micromirrors are used for the modulation of light. 

FIGURE 14.9 Illustration of two tilted micromirrors of TI s digital micromirror device. 

Henck, S.A. Lubrication of Digital Micromirror Devices . Tribology Lett. 1997, 3 (3), 239-247. 

The key innovation in passive dispersive (as opposed to interferometric) spectrometers introduced recently is the use of a programmable digital spatial light modulator (SLM) to encode spectral information. The most advanced version of SLM currently is a reflective digital micromirror array (DMA). The feasibihty of DMA-based multiplexed spectrometers has been experimentally demonstrated recently. ... 

Singh-Gasson S, Green RD, Yue Y, Nelson C, Blattner F, Sussman MR, Cerrina F. 1999. Maskless fabrication of hght-directed ohgonucleotide microarrays using a digital micromirror array. Nat Biotechnol 17 974-978. 

L.J. Hornbeck, Current status of the digital micromirror device (DMD) for projection television applications, IEEE International Electron Devices Meeting, Tech. Digest 1993, 381-384. 

Beanland. r.lectron Microscopy and Analysis, 3rd ed.. London Taylor and Francis. 2001. p. 123.) (b) A nine-micromirror array used lo develop digital micromirror spectrometer for atomic spectroscopy, Mirrors are 16 16 pm on 17-pm centers. Removing the center mirror reveals underlying components. (From J. 1). Batchelor and B. T. Jones. Anal. Chem., 1998, 70. 4907. Copyright 1998 American Chemical Society.) (c An algae mat taken in fully wet condition wilh an ESEM instrument with a gas-phase secondary-eleclron detector with cascade amplification. No sample preparation was needed, From P. J. Goodhew. J. Flumphreys, and R. Beanland. Electron Microscc y sncf Analysis 3rd ed.. London Taylor and Francis. 2001. p. 167 )... 

Grogan SP, et al. Digital micromirror device projection printing system for meniscus tissue engineering. Acta Biomater 2013 9 7218-26. 

In the following, the fabrication and characterization of micromachined high frequency focused polymer ultrasonic transducers in a manner that is compatible with CMOS microelectronics, and MEMS batch fabrication techniques, are described. The specifics of the electronics are not described here, but the interested reader may find more details elsewhere [75, 76, 81-84]. The transducer is capable of being manufactured on silicon wafers after the completion of CMOS electronics. These two key elements enable the eventual creation of a monolithic transducer chip that does not require modification of the standard circuit fabrication process. This type of transducer chip will likely follow the path of other MEMS devices such as accelerometers, gene chips and digital micromirror arrays, where batch production, high yields and... 

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