Silane cylinders

Silane. Silane is a colorless gas that is spontaneously flammable in air and slowly decomposed by water in the presence of aqueous alkah it is completely hydrolyzed to form hydrogen and siUcates. It is manufactured on a commercial scale and sold as a compressed gas in cylinders. It is prepared by the reaction... 

Poly(isoprene-fc- ferrocenyldimethyl- silane) M Cylinder Cobalt magnetic [153] media ... 

All piping and equipment for use with silane must be leak-proof. Leaks will be indicated by flames. Excess may be disposed of by controlled burning. Alternatively, seal cylinders and return to suppliers.2... 

Abstract Polyferrocenyldimethyl-silane (PFS) diblock copolymers with polyisoprene (PFS-PI) or with polydimethylsiloxane (PFS-PDMS) self-assemble in simple alkane solvents to form what appear by TEM to be dense flexible cylinders (nanowires) or nanotube-like structures. Typical widths are on the order of 20 to 30 nm, with variable lengths often greater than 10 un. The structures that form, and the dimensions of the tube-like structures or wires, depend upon the composition of the polymers and the lengths of the blocks. Light scattering experiments show that the PFS-PDMS (block ratio 1 12) solutions aged... 

Fig. 4.19 Phase behavior of P(F)S49-b-PLA192 (, on silanized ITO-coated glass, a Cross-section revealing that the top part of the film formed cylinders orientated perpendicular to the substrate which were voided during PLA etch. In contrast, cylinders aligned parallel to the substrate were adopted at the bottom part of the film which were not voided because of lacking etchant infiltration. Compared to Fig. 4.15 this highlights the advantages of a multicontinuous structure like the DG. b Top-view onto lying cylinders forming a terrace-like structure...

Hazardous Decomp. Prods. Silicon oxide, silane, hydrogen combustion silicon oxide NFPA Health 0, Flammability 4, Reactivity 1 Storage Handle only in sealed, purged systems store cylinders below 55 C away from direct sunlight, precipitation, mech. damage Uses Prod, of silicon and silicon compds. for chemical vapor deposition of dielectric and semiconducting thin films Regulatory SARA 302/311/312/313 nonreportable... 

Before using silane, read all equipment instructions, cylinder labels, data sheets, and other associated information pertaining to silane and its use. 

When pressurizing equipment with silane or a silane mixture, open the cylinder valve slowly. All other equipment adjustments of regulators, needle valves, etc. should also be made slowly. 

Silane is shipped as a compressed gas in cylinders and, in the United States, also in tube trailers under DOT exemption. 

Any cylinders authorized for the shipment of a high-pressure nonliquefied compressed gas may be used in silane service under federal regulations, but cylinders made in accordance with TC/DOT specifications 3A, 3AA, and 3E are probably those most commonly used for silane. See 49 CFR 173.302 [8]. 

Authorized pressure relief devices for use on silane cylinders are the IVpe CG-4 combination rupture disk/fusible plug device wherein the fusible metal has a nominal yield temperature of 165° F (74 °C). Consult CGA S-1.1, Pressure Relief Device Standards— Part 1—Cylinders for Compressed Gases, for further information and requirements. [11]... 

The standard valve outlet connections in the United States and Canada for silane cylinders are Connection CGA 510 for pressures up to 500 psig (3447 kPa) and Connection CGA 350 for pressures up to 3000 psig (20 684 kPa). [12]... 

In another incident, a cylinder of silane detonated while two personnel of an analytical company were analyzing the contents of a cylinder. In this incident, it is surmised that a semiconductor manufacturer inadvertently cross-contaminated the silane with an oxidizer. The silane was originally used by semiconductor company (A) where the contamination probably... 

Silane can be provided in many types of mixtures. Mixed gases can include inert, flammable or toxic supplied in the same cylinder. Unless critical to the process, silane should not be mixed with toxics. New processes should be designed to prohibit this mixing. It should only occur in very few existing processes. When silane is mixed with toxics, the users must also follow all ordinances for the handling of toxic gases. 

The silane cylinders should be of ferrous construction. Some distributors are now providing 6061 aluminum cylinders. These cylinders could fail at approximately 700"F. These cylinders should be avoided and two cylinders should never be used adjacent to one another. 

The piping in the dispensing system is the area where most silane incidents occur. Fortunately, most incidents are not serious. When actuating the system, valves should be opened in a sequence from the cylinder to the tool. It should be shut off in the exact opposite sequence. 

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